Silicon Condenser Microphone and Manufacturing Method
First Claim
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1. A microphone comprising:
- a composite wall housing defining an internal cavity, the composite wall housing having a conductive portion providing an interference shield around the internal cavity;
an acoustic port formed in the housing; and
a transducer disposed within the cavity in communication with the acoustic port.
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Abstract
A silicon condenser microphone package is disclosed. The silicon condenser microphone package comprises a transducer unit, substrate, and a cover. The substrate includes an upper surface having a recess formed therein. The transducer unit is attached to the upper surface of the substrate and overlaps at least a portion of the recess wherein a back volume of the transducer unit is formed between the transducer unit and the substrate. The cover is placed over the transducer unit and includes an aperture.
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Citations
22 Claims
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1. A microphone comprising:
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a composite wall housing defining an internal cavity, the composite wall housing having a conductive portion providing an interference shield around the internal cavity;
an acoustic port formed in the housing; and
a transducer disposed within the cavity in communication with the acoustic port. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification