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Method of manufacturing patterned film

  • US 20070202252A1
  • Filed: 02/02/2007
  • Published: 08/30/2007
  • Est. Priority Date: 02/24/2006
  • Status: Active Grant
First Claim
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1. A method of manufacturing a patterned film comprising the steps of:

  • (a) disposing a multilayered mask containing at least one soft mask layer formed of a soft material and at least one hard mask layer formed of a hard material on one of a substrate and an electrode formed on said substrate;

    (b) spraying powder formed of a brittle material toward said substrate, on which said multilayered mask has been disposed, and allowing the powder to collide with an under layer to deposit the powder thereon, thereby forming a brittle material layer; and

    (c) removing said multilayered mask after step (b).

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