Interdigitated, full wheatstone bridge flow sensor transducer
First Claim
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1. A sensor apparatus, comprising:
- a heating element comprising an upstream side and a downstream side;
a first heat sensing set configured adjacent to the upstream side of the heating element and comprising a first sensing element and a second sensing element, the first and second sensing elements configured in a serpentine, interdigitated pattern; and
a second heat sensing set configured adjacent to the downstream side of the heating element and comprising a third sensing element and a fourth sensing element, the third and fourth sensing elements configured in a serpentine, interdigitated pattern, wherein the first heat sensing element is coupled to the third sensing element to form one half of a Wheatstone bridge and wherein the second heat sensing element is coupled to the fourth sensing element to form a second half of the Wheatstone bridge.
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Abstract
A sensor apparatus includes a heating element comprising an upstream side and a downstream side. A first heat sensing set is generally configured adjacent to the upstream side of the heating element and comprises a first sensing element and a second sensing element, the first and second sensing elements configured in a serpentine, interdigitated pattern. A second heat sensing set can be configured adjacent to the downstream side of the heating element and comprises a third sensing element and a fourth sensing element, the third and fourth sensing elements configured in a serpentine, interdigitated pattern.
27 Citations
20 Claims
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1. A sensor apparatus, comprising:
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a heating element comprising an upstream side and a downstream side;
a first heat sensing set configured adjacent to the upstream side of the heating element and comprising a first sensing element and a second sensing element, the first and second sensing elements configured in a serpentine, interdigitated pattern; and
a second heat sensing set configured adjacent to the downstream side of the heating element and comprising a third sensing element and a fourth sensing element, the third and fourth sensing elements configured in a serpentine, interdigitated pattern, wherein the first heat sensing element is coupled to the third sensing element to form one half of a Wheatstone bridge and wherein the second heat sensing element is coupled to the fourth sensing element to form a second half of the Wheatstone bridge. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 11, 12, 13, 14)
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10. A system for sensing mass flow, comprising:
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a base configured to couple to a microchip;
a heating element coupled to the base and configured in a serpentine pattern with an upstream side and a downstream side;
a first heat sensing element coupled to the base and configured in a serpentine pattern adjacent to the upstream side of the heating element and further configured as a first leg of a Wheatstone bridge;
a second heat sensing element coupled to the base and configured in a serpentine pattern interdigitated with the first heat sensing element and further configured as a second leg of a Wheatstone bridge;
a third heat sensing element coupled to the base and configured in a serpentine pattern adjacent to the downstream side of the heating element and further configured as a third leg of a Wheatstone bridge; and
a fourth heat sensing element coupled to the base and configured in a serpentine pattern interdigitated with the third heat sensing element and further configured as a fourth leg of a Wheatstone bridge.
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15. A method for sensing mass flow, comprising:
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providing a heating element configured in a serpentine pattern and comprising an upstream side and a downstream side;
providing a first heat sensing set adjacent to the upstream side of the heating element configured as a first one-half of a Wheatstone bridge and comprising a first heat sensing element and a second heat sensing element configured in a serpentine, interdigitated pattern;
providing a second heat sensing set adjacent to the downstream side of the heating element configured as a second one-half of a Wheatstone bridge and comprising a third heat sensing element and a fourth heat sensing element configured in a serpentine, interdigitated pattern;
measuring by the first heat sensing set a first temperature;
measuring by the second heat sensing set a second temperature; and
determining a mass flow rate in response to the first and second temperatures. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification