Force detector and acceleration detector and method of manufacturing the same

• US 20070204692A1
• Filed: 03/14/2007
• Published: 09/06/2007
• Est. Priority Date: 10/12/1990
• Status: Active Grant

• Current Assignee: Kazuhiro Okada
• Original Assignee: Kazuhiro Okada
• Inventors: Okada, Kazuhiro
• Granted Patent: US 7,360,455 B2
• Time in Patent Office: Days
• US Class Current: 73/495
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: G01L 1/144 with associated circuitry G01L1/146 and G01L1/148 take precedence
• CPC Class Codes: G01L 5/165 using variations in capacitance
• CPC Class Codes: G01L 5/167 using piezoelectric means
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/0922 of the bending or flexing mode type
• CPC Class Codes: G01P 15/105 by magnetically sensitive devices
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/084 the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Abstract

An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.

Claims

1. An acceleration detector for detecting an acceleration component along an X-axis in an XYZ three-dimensional coordinate system, said detector comprising:

a fixed body and a displacement body, said displacement body being resiliently supported by said fixed body so that said displacement body is displaced with respect to said fixed body in the X-axis direction when acceleration is applied,

a first capacitance element including a first fixed electrode formed on said fixed body and a first displacement electrode formed on said displacement body,

a second capacitance element including a second fixed electrode formed on said fixed body and a second displacement electrode formed on said displacement body, and

an output unit for outputting information indicating an acceleration component along the X-axis,

wherein an electrode distance of said first capacitance element is decreased and an electrode distance of said second capacitance element is increased when said displacement body is displaced in a positive X-axis direction and the electrode distance of said first capacitance element is increased and the electrode distance of said second capacitance element is decreased when said displacement body is displaced in a negative X-axis direction,

wherein said output unit outputs an acceleration component along the X-axis based on a difference between a capacitance value of said first capacitance element and a capacitance value of said second capacitance element, and

wherein said fixed body and said displacement body are made of silicon.

2. The acceleration detector as set forth in claim 1, wherein the respective fixed electrodes and the respective displacement electrodes are made of silicon including impurity.

7. The acceleration detector as set forth in claim 1, the detector further comprising:

an auxiliary electrode operatively on the fixed body opposite to one of the displacement electrodes for moving the displacement body by a Coulomb force when a voltage is applied between said auxiliary electrode and said one of the displacement electrodes.

8. The acceleration detector as set forth in claim 1, the detector further comprising:

an auxiliary electrode operatively on the displacement body opposite to one of the fixed electrodes for moving the displacement body by a Coulomb force when a voltage is applied between said auxiliary electrode and said one of the fixed electrodes.

9. The acceleration detector as set forth in claim 1,

wherein either a plurality of fixed electrodes or a plurality of displacement electrodes are made of a physically single common electrode.

3. An acceleration detector for detecting an acceleration components along an X-axis and a Y-axis in an XYZ three-dimensional coordinate system, said detector comprising:

a fixed body and a displacement body, said displacement body being resiliently supported by said fixed body so that said displacement body is displaced with respect to said fixed body in the X-axis direction and in the Y-axis direction when acceleration is applied,

a first capacitance element including a first fixed electrode formed on said fixed body and a first displacement electrode formed on said displacement body,

a second capacitance element including a second fixed electrode formed on said fixed body and a second displacement electrode formed on said displacement body,

a third capacitance element including a third fixed electrode formed on said fixed body and a third displacement electrode formed on said displacement body,

a fourth capacitance element including a fourth fixed electrode formed on said fixed body and a fourth displacement electrode formed on said displacement body, and

an output unit for outputting information indicating an acceleration components along the X-axis and the Y-axis, respectively,

wherein an electrode distance of said first capacitance element is decreased and an electrode distance of said second capacitance element is increased when said displacement body is displaced in a positive X-axis direction and the electrode distance of said first capacitance element is increased and the electrode distance of said second capacitance element is decreased when said displacement body is displaced in a negative X-axis direction,

wherein an electrode distance of said third capacitance element is decreased and an electrode distance of said fourth capacitance element is increased when said displacement body is displaced in a positive Y-axis direction and the electrode distance of said third capacitance element is increased and the electrode distance of said fourth capacitance element is decreased when said displacement body is displaced in a negative Y-axis direction,

wherein said output unit outputs an acceleration component along the X-axis based on a difference between a capacitance value of said first capacitance element and a capacitance value of said second capacitance element and outputs an acceleration component along the Y-axis based on a difference between a capacitance value of said third capacitance element and a capacitance value of said fourth capacitance element, and

wherein said fixed body and said displacement body are made of silicon.

4. The acceleration detector as set forth in claim 3, wherein the respective fixed electrodes and the respective displacement electrodes are made of silicon including impurity.

10. The acceleration detector as set forth in claim 3, the detector further comprising:

an auxiliary electrode operatively on the fixed body opposite to one of the displacement electrodes for moving the displacement body by a Coulomb force when a voltage is applied between said auxiliary electrode and said one of the displacement electrodes.

12. The acceleration detector as set forth in claim 3, the detector further comprising:

an auxiliary electrode operatively on the displacement body opposite to one of the fixed electrodes for moving the displacement body by a Coulomb force when a voltage is applied between said auxiliary electrode and said one of the fixed electrodes.

14. The acceleration detector as set forth in claim 3,

wherein either a plurality of fixed electrodes or a plurality of displacement electrodes are made of a physically single common electrode.

5. An acceleration detector for detecting an acceleration components along an X-axis, a Y-axis and a Z-axis in an XYZ three-dimensional coordinate system, said detector comprising:

a fixed body and a displacement body, said displacement body being resiliently supported by said fixed body so that said displacement body is displaced with respect to said fixed body in the X-axis direction, in the Y-axis direction and in the Z-axis direction when acceleration is applied,

a first capacitance element including a first fixed electrode formed on said fixed body and a first displacement electrode formed on said displacement body,

a second capacitance element including a second fixed electrode formed on said fixed body and a second displacement electrode formed on said displacement body,

a third capacitance element including a third fixed electrode formed on said fixed body and a third displacement electrode formed on said displacement body,

a fourth capacitance element including a fourth fixed electrode formed on said fixed body and a fourth displacement electrode formed on said displacement body,

a fifth capacitance element including a fifth fixed electrode formed on said fixed body and a fifth displacement electrode formed on said displacement body, and

an output unit for outputting information indicating an acceleration components along the X-axis, the Y-axis and the Z-axis, respectively,

wherein an electrode distance of said first capacitance element is decreased and an electrode distance of said second capacitance element is increased when said displacement body is displaced in a positive X-axis direction and the electrode distance of said first capacitance element is increased and the electrode distance of said second capacitance element is decreased when said displacement body is displaced in a negative X-axis direction,

wherein an electrode distance of said third capacitance element is decreased and an electrode distance of said fourth capacitance element is increased when said displacement body is displaced in a positive Y-axis direction and the electrode distance of said third capacitance element is increased and the electrode distance of said fourth capacitance element is decreased when said displacement body is displaced in a negative Y-axis direction,

wherein an electrode distance of said fifth capacitance element is decreased when said displacement body is displaced in a positive Z-axis direction and the electrode distance of said fifth capacitance element is increased when said displacement body is displaced in a negative Z-axis direction, and

wherein said output unit outputs an acceleration component along the X-axis based on a difference between a capacitance value of said first capacitance element and a capacitance value of said second capacitance element, outputs an acceleration component along the Y-axis based on a difference between a capacitance value of said third capacitance element and a capacitance value of said fourth capacitance element and outputs an acceleration component along the Z-axis based on a capacitance value of said fifth capacitance element.

6. The acceleration detector as set forth in claim 5, wherein the respective fixed electrodes and the respective displacement electrodes are made of silicon including impurity.

11. The acceleration detector as set forth in claim 5, the detector further comprising:

an auxiliary electrode operatively on the fixed body opposite to one of the displacement electrodes for moving the displacement body by a Coulomb force when a voltage is applied between said auxiliary electrode and said one of the displacement electrodes.

13. The acceleration detector as set forth in claim 5, the detector further comprising:

an auxiliary electrode operatively on the displacement body opposite to one of the fixed electrodes for moving the displacement body by a Coulomb force when a voltage is applied between said auxiliary electrode and said one of the fixed electrodes.

15. The acceleration detector as set forth in claim 5,

wherein either a plurality of fixed electrodes or a plurality of displacement electrodes are made of a physically single common electrode.