Reticle protection member, reticle carrying device, exposure device and method for carrying reticle
First Claim
1. A reticle protection member for protecting at least part of a reticle to be used in an exposure device, the reticle protection member comprising an alignment mark indicating the position of the recticle protection member.
1 Assignment
0 Petitions
Accused Products
Abstract
A position measurement device 29 measures the position of a position measurement mark 26 formed on the lower surface of a reticle 1, thereby measuring the position of the reticle 1. A position measurement device 30 measures the position of the position measurement mark 27 formed on the lower surface of a lower lid 2b, thereby measuring the position of the lower lid 2b. The relative displacement of the reticle 1 and lower lid 2b is known when the position of the reticle 1 and the position of the lower lid 2b are known. Therefore, when the lower lid 2b having the reticle 1 loaded thereon is carried with a carrying device and set in an exposure device, the stop position of the lower lid 2b is determined by taking this displacement into account. As a result, the reticle 1 can be correctly set in the exposure device.
42 Citations
15 Claims
- 1. A reticle protection member for protecting at least part of a reticle to be used in an exposure device, the reticle protection member comprising an alignment mark indicating the position of the recticle protection member.
- 4. A reticle carrying device for carrying a reticle, comprising reticle-carrying means for carrying a reticle at least partly protected by a reticle protection member, first position measurement means for measuring the position of the reticle, and second position measurement means for measuring the position of the reticle protection member.
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14. (canceled)
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15. A method for carrying a reticle to be used in an exposure device, comprising the steps of:
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protecting at least part of the reticle with a protection member;
measuring the position of the reticle and the position of protection member while the protection member protects at least part of the reticle; and
removing the reticle from the protection member.
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Specification