Micro mirrors with piezoelectric release mechanism
First Claim
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1. A spatial light modulator, comprising:
- a substrate that includes an object;
a hinge in connection with the substrate;
a mirror plate that is connected with the hinge and is configured to tilt about the hinge, the object being configured and situated to stop the mirror plate at a particular tilt angle; and
a piezoelectric device coupled with the substrate, the piezoelectric device being configured to produce an acoustic wave to assist the separation between the mirror plate and the object.
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Abstract
A spatial light modulator includes a substrate; a hinge in connection with the substrate; a mirror plate that is connected with the hinge and is configured to tilt about the hinge; and a piezoelectric device coupled with the substrate. The piezoelectric device is configured to produce an acoustic wave to assist the separation between the mirror plate and the object.
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Citations
43 Claims
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1. A spatial light modulator, comprising:
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a substrate that includes an object;
a hinge in connection with the substrate;
a mirror plate that is connected with the hinge and is configured to tilt about the hinge, the object being configured and situated to stop the mirror plate at a particular tilt angle; and
a piezoelectric device coupled with the substrate, the piezoelectric device being configured to produce an acoustic wave to assist the separation between the mirror plate and the object. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A spatial light modulator, comprising:
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a substrate;
a hinge in connection with the substrate;
a mirror plate that is connected with the hinge and is configured to tilt about the hinge;
a landing tip in connection with the substrate, wherein the landing tip is configured to contact the lower surface of the mirror plate to limit the tilt movement of the mirror plate; and
a piezoelectric device coupled with the substrate and configured to produce an acoustic wave to assist the separation between the mirror plate and the landing tip. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28)
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29. A micro-mechanical device, comprising:
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a first mechanical component;
a second mechanical component configured to limit the movement of the first mechanical component by coming into contact with a portion of the first mechanical component; and
a piezoelectric device coupled with at least one of the first mechanical component and the second mechanical component, configured to produce an acoustic wave to assist the separation between the first mechanical component and the second mechanical component. - View Dependent Claims (30, 31, 32, 33)
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34. A method for fabricating a spatial light modulator, comprising:
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fabricating a hinge over a substrate;
fabricating a mirror plate in connection with the hinge, wherein the mirror plate can tilt about the hinge and be stopped when the mirror plate comes into contact with an object over the substrate; and
coupling a piezoelectric device with the substrate such that piezoelectric devices can produce an acoustic wave to assist the separation between the mirror plate and the object in connection with substrate. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41, 42, 43)
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Specification