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Thermal mass gas flow sensor and method of forming same

  • US 20070209433A1
  • Filed: 03/10/2006
  • Published: 09/13/2007
  • Est. Priority Date: 03/10/2006
  • Status: Abandoned Application
First Claim
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1. A thermal mass gas flow sensor, comprising:

  • a substrate and at least one pair of thermal sensing elements disposed on said substrate;

    a heater, disposed on said substrate, between said thermal sensing elements; and

    a protective layer disposed on at least said heater and/or said thermal sensing elements, wherein said protective layer comprises a high temperature resistant insulating or dielectric layer.

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