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Magnetic MEMS device

  • US 20070209437A1
  • Filed: 04/07/2006
  • Published: 09/13/2007
  • Est. Priority Date: 10/18/2005
  • Status: Abandoned Application
First Claim
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1. A micro-electro-mechanical system comprising:

  • a base;

    a member adjoined to the base;

    a first magnetic field emitter having an intrinsic magnetic moment;

    a magnetic sensor having an altered output associated with movement of the member and the intrinsic magnetic moment of the magnetic field emitter.

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