Magnetic MEMS device
First Claim
1. A micro-electro-mechanical system comprising:
- a base;
a member adjoined to the base;
a first magnetic field emitter having an intrinsic magnetic moment;
a magnetic sensor having an altered output associated with movement of the member and the intrinsic magnetic moment of the magnetic field emitter.
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Accused Products
Abstract
The present invention relates to magnetic micro-electromechanical systems (MEMS) or magnetic MEMS devices, particularly electronic devices in which a member adjoins a base or substrate and extends from the substrate proximate to a magnetic field element having an altered output associated with movement of the member. The first magnetic field element is adapted to emit or detect a magnetic field and positioned proximate to the member, and the second magnetic field element adapted to emit or detect a magnetic field and positioned proximate to the base or substrate, such that movement of the member in a first direction by a non-magnetic force results in a variation of magnetic field strength associated with displacement of the sensor in a first direction. The invention also relates to methods for fabricating magnetic MEMS devices, transducers, sensors, and accelerometers.
123 Citations
82 Claims
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1. A micro-electro-mechanical system comprising:
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a base;
a member adjoined to the base;
a first magnetic field emitter having an intrinsic magnetic moment;
a magnetic sensor having an altered output associated with movement of the member and the intrinsic magnetic moment of the magnetic field emitter. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. An electronic device comprising:
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a substrate;
a first member extending from the substrate;
a first magnetic field element adapted to do at least one of emit or detect a magnetic field, wherein the first magnetic element is positioned proximate to the first member; and
a second magnetic field element adapted to do at least one of emit or detect a magnetic field, wherein the second magnetic field element is positioned proximate to the substrate, and wherein movement of the first member in a first direction by a non-magnetic force results in a variation of magnetic field strength associated with displacement in a first direction. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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32. A transducer comprising:
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a substrate;
a first member extending from the substrate;
a first magnetic field emitter element adjoining the substrate, wherein the first magnetic field emitter element has an intrinsic magnetic moment; and
a first magnetic field detector element adjoining the substrate and positioned within a magnetic field of the magnetic field emitter element, wherein the detect has an altered output associated with movement of the first member by a non-magnetic force and the intrinsic magnetic moment of the emitter. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59)
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60. A sensor comprising:
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a base;
a member extending from the base;
a magnetic field element having an intrinsic magnetic moment; and
a transducer means for sensing variation in a magnetic field, wherein the variation of the magnetic field is related to movement of the member and the intrinsic magnetic moment of the magnetic field element. - View Dependent Claims (61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71)
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72. An accelerometer comprising:
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a detector having an output, wherein the output fluctuates when subjected to magnetic flux; and
a first emitter having an intrinsic magnetic moment which transmits magnetic flux, wherein movement of the accelerometer and the intrinsic magnetic moment of the first emitter results in variation of the output of the detector. - View Dependent Claims (73, 74, 75, 76, 77, 78, 79, 80, 81, 82)
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Specification