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Capacitive Pressure Sensor

  • US 20070209443A1
  • Filed: 05/12/2005
  • Published: 09/13/2007
  • Est. Priority Date: 05/19/2004
  • Status: Active Grant
First Claim
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1. A capacitance type pressure sensor comprising capacitance detecting portions formed in opposed regions in a capacitance chamber which is at least partially formed of a diaphragm, the capacitance detecting portions being a pressure-sensitive capacitance detecting portion which is formed in region of the diaphragm having large sensitivity with respect to a pressure and a reference capacitance detecting portion which is formed in a region of the diaphragm having small sensitivity with respect to a pressure, wherein a signal output value of the reference capacitance detecting portion is independently detected.

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