Fabry-Perot Interferometer Composite and Method
First Claim
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1. A composite partially reflecting element of a Fabry-Perot interferometer having an optical gap, comprising:
- a) a transparent plate having a surface facing toward the optical gap, b) a partially reflecting layer disposed on the surface of the transparent plate facing toward the optical gap, and c) at least one protective layer on at least one side of the partially reflecting layer.
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Abstract
A composite partially reflecting element of a Fabry-Perot interferometer includes a transparent plate having a surface facing toward the optical gap of the interferometer, a partially reflecting layer disposed on the surface of the transparent plate facing toward the optical gap, and at least one protective layer on at least one side of the partially reflecting layer.
63 Citations
20 Claims
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1. A composite partially reflecting element of a Fabry-Perot interferometer having an optical gap, comprising:
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a) a transparent plate having a surface facing toward the optical gap, b) a partially reflecting layer disposed on the surface of the transparent plate facing toward the optical gap, and c) at least one protective layer on at least one side of the partially reflecting layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A composite partially reflecting element of a Fabry-Perot interferometer having an optical gap, comprising:
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a) a transparent plate having a surface facing toward the optical gap, b) means for partially reflecting light, disposed on the surface of the transparent plate facing toward the optical gap, and c) means for protecting the means for partially reflecting light while preserving at least the partially reflective property of the means for partially reflecting light.
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16. A method comprising steps of:
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a) providing a transparent plate, b) depositing a thin film of metal or cermet to form a partially reflective layer on one side of the transparent plate, and c) depositing over at least the partially reflective layer a protective layer effective to preserve at least the partially reflective property of the partially reflecting layer, whereby a composite partially reflecting element for a Fabry-Perot interferometer is formed. - View Dependent Claims (17, 18)
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19. A method for a Fabry-Perot interferometer having an optical gap, the method comprising steps of:
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a) providing a transparent plate disposed with a surface facing toward the optical gap, b) providing a thin film of metal or cermet to form a partially reflective layer on the surface of the transparent plate facing toward the optical gap, and c) providing a protective layer effective to preserve at least the partially reflective property of the partially reflecting layer, whereby a protected partially reflecting composite element is provided, the materials and thicknesses of the thin film and protective layer being selected such that the composite element has a non-zero extinction coefficient k between about 0.2 and about 2, k being substantially constant with wavelength over a desired wavelength range and such that the composite element has a composite refractive index n, between about 1.5 and about 4, wherein n increases substantially monotonically with wavelength over the desired wavelength range.
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20. A method for making a light modulator, comprising:
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a) providing a substrate having at least an insulating surface, b) depositing and patterning a conductive electrode structure on the insulating surface, c) depositing a first layer of sacrificial material, d) forming a first reflecting plate having a reflective surface, e) depositing a second layer of sacrificial material, f) depositing over the second layer of sacrificial material a protective layer effective to preserve at least the partially reflective property of a partially reflecting surface, g) forming a second reflecting plate having the partially reflective surface, and h) removing the first and second layers of sacrificial material to release at least the first reflecting plate while preserving at least the partially reflective property of the partially reflecting surface.
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Specification