Smart polishing media assembly for planarizing substrates

• US 20070212976A1
• Filed: 03/13/2006
• Published: 09/13/2007
• Est. Priority Date: 03/13/2006
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Prabhu, Gopalakrishna, Iyer, Anand, McReynolds, Peter, Rondum, Erik, Menk, Gregory, Leung, Garlen, Bonner, Benjamin
• Application Number:
  US11/374,250
• Publication Number:
  US 20070212976A1
• Time in Patent Office: Days
• US Class Current: 451/5
• CPC Class Codes: B24B 21/004 using abrasive rolled strips
• CPC Class Codes: B24B 37/20 Lapping pads for working plane surfaces

Abstract

A smart polishing media assembly is provided, along with a polishing system and a method for using the same. In one embodiment, the smart polishing media assembly includes a memory device coupled to a polishing material. The polishing material may be in pad, web or belt form. The memory device generally stores at least one material information, historical use information, and/or conditioning information of the polishing material.

Claims

1. A smart polishing media assembly, comprising:

a polishing material; and

a memory device coupled to the polishing material.

2. The apparatus of claim 1 further comprising:

a core having the polishing material wound thereon.

3. The apparatus of claim 2, wherein the memory device is coupled to the core.

4. The apparatus of claim 1, wherein the memory device is coupled to a leader of the polishing material.

5. The apparatus of claim 1, wherein the memory device is a computer readable and writable device.

6. The apparatus of claim 1, wherein the memory device is coupled to an exterior surface of the polishing material.

7. The apparatus of claim 1, wherein the memory device is embedded in the polishing material.

8. The apparatus of claim 1, wherein the memory device includes information relating to the polishing material, the information comprising at least one of length, thickness, brand, material type, sequence numbers or unique identification code stored thereon.

9. The apparatus of claim 1, wherein the memory device includes historical use information associated with the polishing material stored thereon.

10. The apparatus of claim 1, wherein the memory device includes conditioning information stored thereon.

11. The apparatus of claim 1, wherein the polishing material is a web or belt.

12. The apparatus of claim 1, wherein the polishing material is a pad.

13. A polishing system, comprising:

a polishing station;

a polishing material disposed in the polishing station;

a memory device coupled to the polishing material; and

a computer based controller adapted to communicate with the memory device.

14. The apparatus of claim 13, wherein the memory device is a computer readable and writable device.

15. The apparatus of claim 13, wherein the memory device includes information relating to the polishing material, the information comprising at least one of length, thickness, brand, material type, sequence numbers or unique identification code stored thereon.

16. The apparatus of claim 13, wherein the memory device includes historical use information of the polishing material stored thereon.

17. The apparatus of claim 13, wherein the memory includes conditioning information relating to the polishing material stored thereon.

18. The apparatus of claim 13, wherein the polishing material is a web or belt.

19. The apparatus of claim 13, wherein the polishing material is a pad.

20. The apparatus of claim 13 further comprising:

a core having the polishing material wound thereon, wherein the memory device is coupled to the core.

21. A method for using a smart polishing media assembly in a polishing system, comprising:

reading information from a memory device coupled to a polishing material disposed in a polishing station; and

polishing a substrate placed in contact with the polishing material.

22. The method of claim 21, further comprising:

writing information to the memory device relating to historical use of the polishing material.

23. The method of claim 22, wherein the information written to the memory device is at least one of conditioning information, material polished, fluids used on the polishing material, life of the polishing material or remaining length of a web.

24. The method of claim 21, further comprising:

analyzing the read information; and

determining if polishing should be commenced in response to the read information.

25. The method of claim 21, wherein the step of reading information from a memory device comprises:

reading information indicative of polishing material life.

26. The method of claim 21, wherein the step of reading information from a memory device comprises:

reading information indicative of an unused length of the polishing material.

27. The method of claim 22, wherein the step of reading information from a memory device comprises:

reading information relating to process fluids used on the polishing material.

28. The method of claim 22, wherein the step of reading information from a memory device comprises:

reading information relating to materials polished on the polishing material.