Data collector control system with automatic communication port switch
First Claim
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1. A data collector control system placed between an equipment and an equipment automation programming (EAP) system, comprising:
- a data collector for managing and transmitting communication messages between the equipment and the EAP system when the data collector operates normally; and
an automatic communication port switch control circuit stopping transmission of the communication messages between the equipment and the EAP system through the data collector when the data collector operates abnormally, and the communication messages between the equipment and the EAP system are transmitted through the automatic communication port switch control circuit.
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Abstract
A data collector control system for semiconductor manufacturing comprises a data collector and a automatic communication port switch control circuit. The control system is placed between an equipment and an equipment automation programming (EAP) system. The data collector processes and transmits communication messages between the equipment and the EAP system while the data collector operates normally. The communication messages between the equipment and the EAP system are transmitted through the control circuit instead of the data collector while the data collector operates abnormally.
24 Citations
15 Claims
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1. A data collector control system placed between an equipment and an equipment automation programming (EAP) system, comprising:
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a data collector for managing and transmitting communication messages between the equipment and the EAP system when the data collector operates normally; and
an automatic communication port switch control circuit stopping transmission of the communication messages between the equipment and the EAP system through the data collector when the data collector operates abnormally, and the communication messages between the equipment and the EAP system are transmitted through the automatic communication port switch control circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification