Method and system for high-speed, precise, laser-based modification of one or more electrical elements
First Claim
1. A method of high-speed, precise, laser-based modification of at least one electrical element to adjust a measurable parameter, the at least one electrical element comprising a target material, and being supported on a substrate, the method comprising:
- generating a pulsed laser output having one or more laser pulses at a repetition rate, each laser pulse having a pulse energy, a laser wavelength, and at least one temporal characteristic that sufficiently reduces an ablation threshold energy density of the target material to avoid both substantial spurious opto-electric effects in a non-target material and undesirable damage to the non-target material; and
selectively irradiating the at least one electrical element with the one or more laser pulses focused into at least one spot so as to cause the one or more laser pulses having the wavelength, energy and the at least one temporal characteristic to selectively modify a physical property of the target material of the at least one electrical element while avoiding both the substantial spurious opto-electric effects in the non-target material and undesirable damage to the non-target material.
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Accused Products
Abstract
A method and system for high-speed, precise, laser-based modification of at least one electrical element made of a target material is provided. The system includes a laser subsystem that generates a pulsed laser output wherein each laser pulse has a pulse energy, a laser wavelength within a range of ablation sensitivity of the target material, and a pulse duration short enough to substantially reduce ablation threshold energy density of the target material. The system further includes a beam positioner that selectively irradiates the at least one electrical element with the one or more laser pulses focused into at least one spot so as to cause the one or more laser pulses to selectively ablate a portion of the target material from the at least one element while avoiding both substantial spurious opto-electric effects and undesirable damage to the non-target material.
117 Citations
58 Claims
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1. A method of high-speed, precise, laser-based modification of at least one electrical element to adjust a measurable parameter, the at least one electrical element comprising a target material, and being supported on a substrate, the method comprising:
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generating a pulsed laser output having one or more laser pulses at a repetition rate, each laser pulse having a pulse energy, a laser wavelength, and at least one temporal characteristic that sufficiently reduces an ablation threshold energy density of the target material to avoid both substantial spurious opto-electric effects in a non-target material and undesirable damage to the non-target material; and selectively irradiating the at least one electrical element with the one or more laser pulses focused into at least one spot so as to cause the one or more laser pulses having the wavelength, energy and the at least one temporal characteristic to selectively modify a physical property of the target material of the at least one electrical element while avoiding both the substantial spurious opto-electric effects in the non-target material and undesirable damage to the non-target material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A system for high-speed, precise, laser-based modification of at least one electrical element to adjust a measurable parameter, the at least one electrical element comprising a target material supported on a substrate, the system comprising:
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a laser subsystem that generates a pulsed laser output having one or more laser pulses at a repetition rate, each laser pulse having a pulse energy, a laser wavelength, and at least one temporal characteristic that sufficiently reduces an ablation threshold energy density of the target material to avoid both substantial spurious opto-electric effects in the non-target material and undesirable damage to the non-target material; and a beam positioner that selectively irradiates the at least one electrical element with the one or more laser pulses focused into at least one spot so as to cause the one or more laser pulses having the wavelength, energy and the at least one temporal characteristic to selectively modify a physical property of the target material of the at least one electrical element while avoiding both the substantial spurious opto-electric effects in the non-target material and undesirable damage to the non-target material. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58)
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Specification