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ELECTROSTATIC CHUCK

  • US 20070217114A1
  • Filed: 01/30/2007
  • Published: 09/20/2007
  • Est. Priority Date: 01/31/2006
  • Status: Active Grant
First Claim
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1. An electrostatic chuck comprising:

  • a body that has an internal electrode for attracting a flat substrate by an electrostatic force provided therein;

    a plurality of protrusions that are formed on one surface of the body, serving as an electrostatic attraction surface; and

    one or more minute projections that are provided on each of top surfaces of some or all of the plurality of protrusions, wherein a region of the top surface of each of the minute projections on which the flat substrate is loaded is referred to as a mounting surface, and the total area of the mounting surfaces of the minute projections is equal to or larger than 0.01% and equal to or smaller than 2% of the area of the electrostatic attraction surface.

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