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Capacitive bulk acoustic wave disk gyroscopes

  • US 20070220971A1
  • Filed: 11/20/2006
  • Published: 09/27/2007
  • Est. Priority Date: 03/27/2006
  • Status: Active Grant
First Claim
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1. Gyroscope apparatus, comprising:

  • a bulk acoustic resonator element; and

    a plurality of electrodes, which electrodes can excite and detect at least two degenerate bulk acoustic wave resonant modes in the bulk acoustic resonator element.

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