Light-emitting diode and method for manufacturing the same
First Claim
1. A method for manufacturing a light-emitting diode, comprising:
- providing an illuminant epitaxial structure, wherein the illuminant epitaxial structure has a first surface and a second surface on opposite sides, and a substrate is deposed on the first surface of the illuminant epitaxial structure;
forming a metal layer on the second surface of the illuminant epitaxial structure;
performing an anodic oxidization step to oxidize the metal layer, so as to form a metal oxide layer; and
performing an etching step to remove a portion of the metal oxide layer, so as to form a plurality of holes in the metal oxide layer.
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Accused Products
Abstract
A light-emitting diode (LED) and a method for manufacturing the same are described. The method for manufacturing the LED comprises the following steps. An illuminant epitaxial structure is provided, in which the illuminant epitaxial structure has a first surface and a second surface on opposite sides, and a substrate is deposed on the first surface of the illuminant epitaxial structure. A metal layer is formed on the second surface of the illuminant epitaxial structure. An anodic oxidization step is performed to oxidize the metal layer, so as to form a metal oxide layer. An etching step is performed to remove a portion of the metal oxide layer, so as to form a plurality of holes in the metal oxide layer.
10 Citations
44 Claims
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1. A method for manufacturing a light-emitting diode, comprising:
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providing an illuminant epitaxial structure, wherein the illuminant epitaxial structure has a first surface and a second surface on opposite sides, and a substrate is deposed on the first surface of the illuminant epitaxial structure; forming a metal layer on the second surface of the illuminant epitaxial structure; performing an anodic oxidization step to oxidize the metal layer, so as to form a metal oxide layer; and performing an etching step to remove a portion of the metal oxide layer, so as to form a plurality of holes in the metal oxide layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method for manufacturing a light-emitting diode, comprising:
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providing a substrate, wherein the substrate has a first surface and a second surface on opposite sides; forming an illuminant epitaxial structure on the first surface of the substrate, wherein the illuminant epitaxial structure comprises a first conductivity type semiconductor layer, an active layer and a second conductivity type semiconductor layer stacked on the substrate in sequence, and the first conductivity type semiconductor layer and the second conductivity type semiconductor layer have different conductivity types; removing a portion of the second conductivity type semiconductor layer and a portion of the active layer to expose a portion of the first conductivity type semiconductor layer; forming a metal layer on the second surface of the substrate; performing an anodic oxidization step to oxidize the metal layer, so as to form a metal oxide layer; performing an etching step to remove a portion of the metal oxide layer, so as to form a plurality of holes in the metal oxide layer; providing a sub-mount, wherein at least two bonding bumps are set on a surface of the sub-mount; and performing a flip chip step to make the exposed portion of the first conductivity type semiconductor layer and the second conductivity type semiconductor layer respectively connect with the bonding bumps on the sub-mount. - View Dependent Claims (22, 23, 24, 25, 26)
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27. A light-emitting diode, comprising:
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an illuminant epitaxial structure having a first surface and a second surface on opposite sides, and a substrate is deposed on the first surface of the illuminant epitaxial structure; and an anodic oxidation metal layer deposed on the second surface of the illuminant epitaxial structure, wherein the anodic oxidation metal layer is formed from a metal layer, and the anodic oxidation metal layer includes a plurality of holes. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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40. A light-emitting diode, comprising:
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a substrate having a first surface and a second surface on opposite sides; an illuminant epitaxial structure on the first surface of the substrate, wherein the illuminant epitaxial structure comprises a first conductivity type semiconductor layer, an active layer and a second conductivity type semiconductor layer stacked on the substrate in sequence, a stacked structure composed of the active layer and the second conductivity type semiconductor layer exposes a portion of the first conductivity type semiconductor layer, and the first conductivity type semiconductor layer and the second conductivity type semiconductor layer have different conductivity types; an anodic oxidation metal layer deposed on the second surface of the substrate, wherein the anodic oxidation metal layer is formed from a metal layer, and the anodic oxidation metal layer includes a plurality of holes; and a sub-mount, wherein at least two bonding bumps are set on a surface of the sub-mount, and the exposed portion of the first conductivity type semiconductor layer and the second conductivity type semiconductor layer respectively connect with the bonding bumps on the sub-mount. - View Dependent Claims (41, 42, 43, 44)
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Specification