Capacitive distance sensing in semiconductor processing tools
First Claim
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1. A sensor for sensing a distance to an object of interest within a semiconductor processing chamber, the sensor including:
- a housing;
a power source disposed within the housing;
wireless communication circuitry coupled to the power source;
a controller coupled to wireless communication circuitry and to the power source;
at least one capacitive plate configured to form a capacitor having a capacitance that varies with the distance;
measurement circuitry coupled to the controller and to the at least one capacitive plate, the measurement circuitry being configured to measure the capacitance and provide an indication thereof to the controller; and
wherein the controller is configured to provide an indication relative to the object based at least in part upon the measured capacitance.
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Abstract
A wireless sensor includes at least one capacitive plate for sensing a distance relative to an object of interest within a semiconductor-processing environment. The sensor includes an internal power source and wireless communication such that distance and/or parallelism measurements effected using the capacitive plate(s) can be provided wirelessly to an external device.
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Citations
21 Claims
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1. A sensor for sensing a distance to an object of interest within a semiconductor processing chamber, the sensor including:
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a housing;
a power source disposed within the housing;
wireless communication circuitry coupled to the power source;
a controller coupled to wireless communication circuitry and to the power source;
at least one capacitive plate configured to form a capacitor having a capacitance that varies with the distance;
measurement circuitry coupled to the controller and to the at least one capacitive plate, the measurement circuitry being configured to measure the capacitance and provide an indication thereof to the controller; and
wherein the controller is configured to provide an indication relative to the object based at least in part upon the measured capacitance. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of sensing a distance to an object of interest within a semiconductor processing chamber, the method comprising:
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bringing a plurality of capacitive plates into proximity of the object of interest;
applying excitation voltages of substantially equal magnitude, but opposite polarity to the plurality of capacitive plates;
sensing the effective capacitance between the plurality of capacitive plates, and the object of interest; and
providing an indication relative to the object based at least in part upon the measured capacitance. - View Dependent Claims (17, 18, 19, 20, 21)
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Specification