Radar device and MEMS mirror device therefor
First Claim
1. An MEMS mirror device comprising:
- a semiconductor substrate having a surface with areas arranged in a matrix form;
a plurality of semiconductor elements each formed by a semiconductor process as a mirror element with a mirror surface in different one of said areas; and
at least one photodiode each at different one of said areas.
1 Assignment
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Accused Products
Abstract
A radar device includes a light projecting part that generates laser light, a light projecting lens that converges the generated laser light to form a beam, a reflective mirror for reflecting the converged beam to project it in a specified search direction and for reflecting returning light from this search direction, a light receiving lens for converging the returning light reflected by the reflective mirror, and a scanning part for moving the beam in a scanning manner. There are two light receiving parts which are different in photosensitivity, and a synthesizing part outputs a synthesized signal formed by synthesizing output signals from these two light receiving parts.
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Citations
19 Claims
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1. An MEMS mirror device comprising:
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a semiconductor substrate having a surface with areas arranged in a matrix form;
a plurality of semiconductor elements each formed by a semiconductor process as a mirror element with a mirror surface in different one of said areas; and
at least one photodiode each at different one of said areas.
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2. A radar device comprising:
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a light projecting part that generates laser light;
a first light receiving part that converts received light into a signal;
an optical system that uses an MEMS mirror and serves to form said laser light generated by said light projecting part into a beam, to project said beam in a specified search direction, to receive reflected light from said search direction and to lead said received light to said first light receiving part, said MEMS mirror having a semiconductor substrate having a surface that is mirror-finished by a semiconductor process and at least one photodiode on said surface;
a second light receiving part including said at least one photodiode formed on said MEMS mirror and having a photosensitive range for reflected light with higher brightness than the photosensitive range of said first light receiving part; and
a synthesizing part that outputs a synthesized signal formed by synthesizing outputs from said first light receiving part and said second light receiving part. - View Dependent Claims (3, 4)
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5. A radar device comprising:
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a light projecting part that generates laser light;
a first light receiving part that converts received light into a signal;
an optical system that uses an MEMS mirror and serves to form said laser light generated by said light projecting part into a beam, to project said beam in a specified search direction, to receive reflected light from said search direction and to lead said received light to said first light receiving part, said MEMS mirror having a semiconductor substrate having a surface with areas arranged in a matrix form, a plurality of semiconductor elements each formed by a semiconductor process as a mirror element with a mirror surface in different one of said areas, and at least one photodiode each at different one of said areas;
a second light receiving part including said at least one photodiode formed on said MEMS mirror and having a photosensitive range for reflected light with higher brightness than the photosensitive range of said first light receiving part; and
a synthesizing part that outputs a synthesized signal formed by synthesizing outputs from said first light receiving part and said second light receiving part. - View Dependent Claims (6, 7, 8)
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9. A radar device comprising:
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a light projecting part that generates laser light;
a light projecting lens that converges said laser light generated by said light projecting part to form said generated laser light into a beam;
a reflective mirror for reflecting said converged laser light formed into said beam to thereby project said beam in a specified search direction and for reflecting returning light from said search direction;
a light receiving lens for converging said returning light reflected by said reflective mirror;
a scanning part having a mobile part and serving to move said beam in a scanning manner by driving said mobile part;
a first light receiving part for receiving said returning light converged by said light receiving lens and converting said received returning light into a signal;
a second light receiving part including at least one photodiode formed on said reflective mirror and serving to receive said returning light from said search direction and to convert said received returning signal into a signal; and
a synthesizing part that outputs a synthesized signal formed by synthesizing output signals from said first light receiving part and said second light receiving part. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification