Exposure apparatus, exposure method, and method for producing device

• US 20070222957A1
• Filed: 05/18/2007
• Published: 09/27/2007
• Est. Priority Date: 06/10/2004
• Status: Active Grant

• Current Assignee: Nikon Corporation, Nikon Engineering Co. Ltd. (Nikon Corporation)
• Original Assignee: Nikon Corporation, Nikon Engineering Co. Ltd. (Nikon Corporation)
• Inventors: Nagasaka, Hiroyuki, Okuyama, Takeshi
• Granted Patent: US 8,717,533 B2
• Time in Patent Office: Days
• US Class Current: 355/53
• CPC Class Codes: G03B 27/42 for automatic sequential copying of the same original G03B27/34, G03B27/53 take precedence
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041

Abstract

A lithographic projection projects a pattern from a patterning device onto a substrate through a liquid confined to a space adjacent the substrate. The space is smaller in plan than the substrate. The apparatus includes a plate substantially parallel to the substrate to divide the space into two parts, the plate having an aperture to allow transmission of the pattern onto the substrate.

Claims

1. A lithographic projection apparatus arranged to project a pattern from a patterning device onto a substrate through a liquid confined to a space adjacent the substrate, the space being smaller in plan than the substrate, the apparatus comprising a plate substantially parallel to the substrate to divide the space into two parts, the plate having an aperture to allow transmission of the pattern onto the substrate.

2. The apparatus according to claim 1, wherein the aperture is open.

3. The apparatus according to claim 2, further comprising a projection system, a liquid supply port configured to supply liquid to a part of the space adjacent the projection system, and a liquid extraction port configured to extract liquid from a part of the space adjacent the substrate.

4. The apparatus according to claim 3, wherein a pressure of the liquid in the part of the space adjacent the projection system is higher than the pressure of the liquid in the part of the space adjacent the substrate.

5. The apparatus according to claim 3, wherein there are at least two plates.

6. The apparatus according to claim 1, wherein an edge of the aperture in the plate is beveled.

7. The apparatus according to claim 1, wherein there are at least two plates.

8. The apparatus according to claim 1, wherein the aperture is closed by a window of substantially transparent material.

9. The apparatus according to claim 1, wherein the plate comprises a radiation absorptive material.

10. A lithographic apparatus, comprising:

an illuminator configured to condition a radiation beam;

a support constructed to hold a patterning device, the patterning device configured to impart the radiation beam with a pattern in its cross-section to form a patterned radiation beam;

a substrate table constructed to hold a substrate;

a projection system configured to project the patterned radiation beam onto a target portion of the substrate;

a liquid supply system configured to at least partly fill a space between the projection system and the substrate with a liquid, the liquid supply system comprising a liquid confinement structure configured to at least partly confine the liquid within the space; and

a plate substantially parallel to the substrate to divide the space into two parts, the plate having at least a portion thereof radiation transmissive to allow transmission of the pattern onto the substrate.

11. The apparatus according to claim 10, wherein the portion comprises an open aperture.

12. The apparatus according to claim 11, wherein an edge of the aperture is beveled.

13. The apparatus according to claim 11, further comprising a liquid supply port configured to supply liquid to a part of the space adjacent the projection system, and a liquid extraction port configured to extract liquid from a part of the space adjacent the substrate.

14. The apparatus according to claim 13, wherein a pressure of the liquid in the part of the space adjacent the projection system is higher than the pressure of the liquid in the part of the space adjacent the substrate.

15. The apparatus according to claim 10, wherein there are at least two plates.

16. The apparatus according to claim 10, wherein the portion comprises a window of substantially transparent material.

17. The apparatus according to claim 10, wherein the space is smaller in plan than the substrate.

18. The apparatus according to claim 10, wherein a portion of the liquid confinement structure is between the projection system and the substrate and the plate is between the liquid confinement structure and the substrate.

19. The apparatus according to claim 18, further comprising:

a liquid supply port configured to supply liquid to a part of the space between the projection system and the liquid confinement structure; and

a liquid extraction port configured to extract liquid from a part of the space between the liquid confinement structure and the plate and between the plate and the substrate.

20. The apparatus according to claim 18, further comprising:

a liquid supply port configured to supply liquid to a part of the space between the projection system and the liquid confinement structure and between the liquid confinement structure and the plate; and

a liquid extraction port configured to extract liquid from a part of the space between the plate and the substrate.

21. The apparatus according to claim 18, further comprising:

a liquid supply port configured to supply liquid to a part of the space between the projection system and the liquid confinement structure and between the plate and the substrate; and

a liquid extraction port configured to extract liquid from a part of the space between the liquid confinement structure and the plate.

22. A device manufacturing method, comprising:

supplying a liquid to a space adjacent a substrate, the space being smaller in plan than the substrate and divided into two parts by a plate substantially parallel to the substrate, the plate having at least a portion transmissive to radiation; and

projecting a patterned beam of radiation through the liquid and through the portion onto the substrate.

23. The method according to claim 22, further comprising supplying liquid to a part of the space adjacent a projection system used to project the patterned beam, and extracting liquid from a part of the space adjacent the substrate.

24. The method according to claim 23, wherein a pressure of the liquid in the part of the space adjacent the projection system is higher than the pressure of the liquid in the part of the space adjacent the substrate.

25. The method according to claim 22, wherein the space is divided by at least two plates.

26. The method according to claim 22, wherein the portion comprises a window of substantially transparent material.

27. The method according to claim 22, wherein a portion of a liquid confinement structure, configured to at least partly confine the liquid within the space, is between a projection system used to project the patterned beam and the substrate and the plate is between the liquid confinement structure and the substrate.

28. The method according to claim 27, further comprising:

supplying liquid to a part of the space between the projection system and the liquid confinement structure; and

extracting liquid from a part of the space between the liquid confinement structure and the plate and between the plate and the substrate.

29. The method according to claim 27, further comprising:

supplying liquid to a part of the space between the projection system and the liquid confinement structure and between the liquid confinement structure and the plate; and

extracting liquid from a part of the space between the plate and the substrate.

30. The method according to claim 27, further comprising:

supplying liquid to a part of the space between the projection system and the liquid confinement structure and between the plate and the substrate; and

extracting liquid from a part of the space between the liquid confinement structure end the plate.