CAM reference for inspection of contour images

• US 20070223804A1
• Filed: 04/20/2007
• Published: 09/27/2007
• Est. Priority Date: 12/23/1999
• Status: Abandoned Application

• Current Assignee: Orbotech Limited (KLA Corporation)
• Original Assignee: Orbotech Limited (KLA Corporation)
• Inventors: Gilat-Bernshtein, Tally, Gutman, Zeev
• Application Number:
  US11/785,838
• Publication Number:
  US 20070223804A1
• Time in Patent Office: Days
• US Class Current: 382/147
• CPC Class Codes: G01N 2021/95615 with stored comparision signal
• CPC Class Codes: G01N 2021/95638 for PCB's
• CPC Class Codes: G01N 21/95607 using a comparative method
• CPC Class Codes: G01N 21/95684 Patterns showing highly reflecting parts, e.g. metallic elements
• CPC Class Codes: G01R 31/311 of integrated circuits G01R31/31728 takes precedence
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 7/0006 using a design-rule based approach

Abstract

This invention discloses an electrical circuit inspection system including an optical subsystem for optically inspecting an electrical circuit and providing an inspection output identifying more than two different types of regions and an analysis subsystem for analyzing the inspection output, the analyzing including comparing the inspection output with a computer file reference identifying more than two different types of regions. A method for inspecting an electrical circuit inspection is also disclosed.

Claims

1. An electrical circuit inspection system comprising:

an optical subsystem for optically inspecting an electrical circuit and providing an inspection output identifying more than two different types of regions; and

an analysis subsystem for analyzing said inspection output, said analyzing including comparing said inspection output with a computer file reference identifying more than two different types of regions.

2-77. -77. (canceled)