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Method for wafer level package of sensor chip

  • US 20070224728A1
  • Filed: 03/22/2006
  • Published: 09/27/2007
  • Est. Priority Date: 03/22/2006
  • Status: Active Grant
First Claim
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1. A method for wafer level package (WLP) of sensor chips, comprising the steps of:

  • (a) providing a wafer, the wafer including a plurality of die regions, each die region on a first surface of the wafer comprising an active area and a pad surrounding the active area;

    (b) bounding a transparent protective layer to the first surface of the wafer;

    (c) forming a stress buffer on a second surface of the wafer;

    (d) using an etching technique to form a via hole at the location between two neighboring die regions through the stress buffer and the wafer to expose the pad or a conductive line between two neighboring pads; and

    (e) forming a plurality of bump electrodes on the stress buffer for electrical connection to the pads through the via holes.

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