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Substrate Holder Having a Fluid Gap and Method of Fabricating the Substrate Holder

  • US 20070224777A1
  • Filed: 12/23/2004
  • Published: 09/27/2007
  • Est. Priority Date: 01/30/2004
  • Status: Active Grant
First Claim
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1. A substrate holder for supporting a substrate, comprising:

  • a supporting surface;

    a cooling component;

    a heating component positioned adjacent to the supporting surface and between the supporting surface and the cooling component;

    a fluid gap positioned between the cooling component and the heating component, the fluid gap configured to receive a fluid to vary the thermal conductance between the cooling component and the heating component; and

    a brazing material disposed between the cooling component and the heating component, the brazing material disposed adjacent to the fluid gap.

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