Post structure, semiconductor device and light emitting device using the structure, and method for forming the same
First Claim
Patent Images
1. A method for forming a post structure comprising:
- forming unit patterns on a substrate by use of a first material;
growing a wet-etchable second material on the substrate formed with the unit patterns; and
wet etching the substrate having the grown second material.
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Abstract
A nanometer-scale post structure and a method for forming the same are disclosed. More particularly, a post structure, a light emitting device using the structure, and a method for forming the same, which is capable of forming a nanometer-scale post structure having a repetitive pattern by using an etching process, are disclosed. The method includes forming unit patterns on a substrate by use of a first material, growing a wet-etchable second material on the substrate formed with the unit patterns, and wet etching the substrate having the grown second material.
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Citations
26 Claims
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1. A method for forming a post structure comprising:
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forming unit patterns on a substrate by use of a first material; growing a wet-etchable second material on the substrate formed with the unit patterns; and wet etching the substrate having the grown second material. - View Dependent Claims (2, 3, 4)
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5. A method for forming a semiconductor device comprising:
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forming unit patterns on a substrate by use of a first material; growing a wet-etchable second material on the substrate formed with the unit patterns; wet etching the substrate having the grown second material, to form a post structure; forming a third material layer over the post structure; etching a plane formed with the third material layer; and removing at least a part of the post structure. - View Dependent Claims (6, 7, 8, 9)
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10. A method for forming a light emitting device comprising:
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forming unit patterns on a substrate by use of a first material; growing a wet-etchable second material on the substrate formed with the unit patterns; wet etching the substrate having the grown second material, to form a post structure; forming a semiconductor layers having multi-layer structure on the substrate formed with the post structure; forming a first electrode on the semiconductor layers; removing the substrate; and forming a second electrode on the semiconductor layers that is exposed after removing the substrate. - View Dependent Claims (11)
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12. A post structure comprising:
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a substrate; unit patterns formed on the substrate by use of a first material; and a plurality of polygonal posts connected to the unit patterns, respectively, the posts being made of a second material. - View Dependent Claims (13, 14, 15, 16, 17)
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18. A light emitting device comprising:
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a plurality of semiconductor layers having a first plane and a second plane; a plurality of posts periodically arranged at the first plane of the semiconductor layers, each post having a protrusion protruded from the first plane; a first electrode located on the second plane of the semiconductor layers; and a second electrode located on the first plane of the semiconductor layers. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26)
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Specification