Yaw Rate Sensor
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Abstract
The yaw rate sensor of the present invention has force-conveying means. The central idea of the invention is that the force action conveyed by this arrangement has a frequency such that the frequency of the conveyed force action is an integral multiple of the frequency of the oscillation of the drive element parallel to the X-axis.
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Citations
20 Claims
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1-10. -10. (canceled)
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11. A yaw rate sensor, comprising:
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a substrate;
a drive element;
a Coriolis element situated above a surface of the substrate; and
a force-conveying arrangement for conveying a dynamic action of a force between the substrate and the Coriolis element, wherein;
the Coriolis element is capable of being induced by the drive element to oscillate parallel to a first axis, a deflection of the Coriolis element in a second axis that is substantially perpendicular to the first axis is detectable, the first axis and the second axis are parallel to the surface of the substrate, and the force action has at least one frequency such that is an integral multiple of a frequency of oscillation of the drive element parallel to the first axis. - View Dependent Claims (12, 13, 14, 15, 17, 19, 20)
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18. A yaw rate sensor, comprising:
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a substrate;
a drive element;
two Coriolis elements situated above a surface of the substrate and positioned symmetrically with respect to one another;
a mechanical coupling provided between the two Coriolis elements; and
a force-conveying arrangement for conveying a dynamic action of a force between the substrate and the Coriolis element, wherein;
the Coriolis elements are capable of being induced by the drive element to oscillate parallel to a first axis, a deflection of the Coriolis elements in a second axis that is substantially perpendicular to the first axis is detectable, the first axis and the second axis are parallel to the surface of the substrate, and the force action has at least one frequency such that is an integral multiple of a frequency of oscillation of the drive element parallel to the first axis.
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Specification