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System and apparatus for sensing pressure in living organisms and inanimate objects

  • US 20070234815A1
  • Filed: 06/01/2007
  • Published: 10/11/2007
  • Est. Priority Date: 08/22/2003
  • Status: Active Grant
First Claim
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1. An apparatus for measuring pressure, comprising:

  • a microelectronic device;

    an interface member attached to the microelectronic device;

    a pressure sensor having a diaphragm responsive to external pressure exerted upon the diaphragm;

    wherein the interface member is positioned between the microelectronic device and the pressure sensor and is attached to the pressure sensor providing a first cavity between the pressure sensor diaphragm and the interface member and wherein the pressure in the first cavity is set at an initial predetermined pressure.

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