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Inspection system by charged particle beam and method of manufacturing devices using the same

  • US 20070235644A1
  • Filed: 06/01/2007
  • Published: 10/11/2007
  • Est. Priority Date: 06/27/2000
  • Status: Active Grant
First Claim
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1. An inspection apparatus for inspecting a sample for defects, comprising:

  • a charged particle irradiation means capable of irradiating a primary charged particles against said sample;

    a projecting means for projecting secondary charged particles emanated from said sample by the irradiation of said primary charged particles so as to form an image;

    a detection means for detecting an image formed by said projecting means as an electron image of said sample; and

    a defect evaluation means for determining a defect in said sample based on an electron image detected by said detection means, wherein electrons having energy lower than that of said primary charged particles are supplied to said sample at least while said detection means is detecting said electron image.

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