Methods and apparatus for a packaged MEMS switch
First Claim
Patent Images
1. A MEMS switch device comprising:
- a substrate;
a package seal coupled to the substrate and having a surface internal to the MEMS device; and
a first actuation electrode formed on the surface of the package seal.
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Abstract
A micro-electro mechanical system (NEMS) device, such as a MEMS switch (100), includes a package seal (104) bonded to a substrate (102), wherein an electrode 106 (e.g., an actuation electrode associated with a switch) is provided on an inner surface (103) of the package seal (104). The MEMS switch (100) might include, for example, a central switch structure implementing a double-pole, single-throw switch using a push-pull arrangement of internal activation electrodes (106, 108). The central switch structure might include a cantilevered moveable actuation electrode (122) or an electrode supported in two or more peripheral regions.
41 Citations
20 Claims
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1. A MEMS switch device comprising:
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a substrate;
a package seal coupled to the substrate and having a surface internal to the MEMS device; and
a first actuation electrode formed on the surface of the package seal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for forming a MEMS switch device, comprising:
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providing a substrate;
forming a central switch structure on the substrate, the central switch structure including a moveable actuation electrode;
forming a top actuation electrode above the moveable actuation electrode;
forming a package seal layer on the stationary actuation electrode. - View Dependent Claims (13, 14, 15)
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16. A MEMS switch comprising:
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a substrate having a bottom transmission line contact and a bottom activation electrode;
a package seal coupled to the substrate and having a top transmission line contact and a top activation electrode;
a central switch structure provided between the substrate and the package seal, wherein the central switch includes a moveable activation electrode and a moveable transmission line contact, and wherein the central switch structure is configured to have a first throw mode and a second throw mode, the first throw mode corresponding to electrical contact between the moveable activation electrode and the first transmission line contact, and the second throw mode corresponding to electrical contact between the moveable activation electrode and the second transmission line contact. - View Dependent Claims (17, 18, 19, 20)
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Specification