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Compact, hand-held Raman spectrometer microsystem on a chip

  • US 20070236697A1
  • Filed: 04/10/2006
  • Published: 10/11/2007
  • Est. Priority Date: 04/10/2006
  • Status: Active Grant
First Claim
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1. An integrated spectrometer instrument, comprising:

  • an optical source formed on a chip, said optical source configured to generate an incident optical beam upon a sample to be measured;

    collection optics formed on the chip, said collection optics configured to receive a scattered optical beam from the sample;

    filtering optics formed on the chip, said filtering optics configured to remove elastically scattered light from said scattered optical beam at a wavelength corresponding to said optical source;

    a tunable filter formed on the chip, said tunable filter configured to pass selected wavelengths of said scattered optical beam; and

    a photo detector device formed on the chip, said photo detector device configured to generate an output signal corresponding to the intensity of photons passed through said tunable filter.

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