Compact, hand-held Raman spectrometer microsystem on a chip
First Claim
1. An integrated spectrometer instrument, comprising:
- an optical source formed on a chip, said optical source configured to generate an incident optical beam upon a sample to be measured;
collection optics formed on the chip, said collection optics configured to receive a scattered optical beam from the sample;
filtering optics formed on the chip, said filtering optics configured to remove elastically scattered light from said scattered optical beam at a wavelength corresponding to said optical source;
a tunable filter formed on the chip, said tunable filter configured to pass selected wavelengths of said scattered optical beam; and
a photo detector device formed on the chip, said photo detector device configured to generate an output signal corresponding to the intensity of photons passed through said tunable filter.
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Accused Products
Abstract
An integrated spectrometer instrument, including an optical source formed on a chip, the optical source configured to generate an incident optical beam upon a sample to be measured. Collection optics formed on the chip are configured to receive a scattered optical beam from the sample, and filtering optics formed on the chip are configured to remove elastically scattered light from the scattered optical beam at a wavelength corresponding to the optical source. A tunable filter formed on the chip is configured to pass selected wavelengths of the scattered optical beam, and a photo detector device formed on the chip is configured to generate an output signal corresponding to the intensity of photons passed through the tunable filter.
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Citations
27 Claims
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1. An integrated spectrometer instrument, comprising:
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an optical source formed on a chip, said optical source configured to generate an incident optical beam upon a sample to be measured;
collection optics formed on the chip, said collection optics configured to receive a scattered optical beam from the sample;
filtering optics formed on the chip, said filtering optics configured to remove elastically scattered light from said scattered optical beam at a wavelength corresponding to said optical source;
a tunable filter formed on the chip, said tunable filter configured to pass selected wavelengths of said scattered optical beam; and
a photo detector device formed on the chip, said photo detector device configured to generate an output signal corresponding to the intensity of photons passed through said tunable filter. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A portable, hand-held spectrometer device, comprising:
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a body having operator controls and an output display;
an optical signal output port through which an internally generated incident optical beam is directed, and an optical signal input port through which a sample-scattered optical beam is received;
said incident optical beam generated by an optical source formed on a chip housed within said body;
collection optics formed on said chip, said collection optics configured to receive said sample-scattered optical beam;
filtering optics formed on the chip, said filtering optics configured to remove elastically scattered light from said sample-scattered optical beam at a wavelength corresponding to said optical source;
a tunable filter formed on the chip, said tunable filter configured to pass selected wavelengths of said sample-scattered optical beam; and
a photo detector device formed on the chip, said photo detector device configured to generate an output signal corresponding to the intensity of photons passed through said tunable filter. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification