Method and apparatus for modulation using a conductive waveguide

• US 20070237443A1
• Filed: 03/30/2007
• Published: 10/11/2007
• Est. Priority Date: 03/31/2006
• Status: Active Grant

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Geis, Michael, Lyszczarz, Theodore, Jung, Yoon, Spector, Steven, Grein, Matthew, Lennon, Donna
• Granted Patent: US 8,818,150 B2
• Time in Patent Office: Days
• US Class Current: 385/2
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: G02F 1/0136 for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation G02F1/0353 takes precedence
• CPC Class Codes: G02F 1/025 in an optical waveguide structure G02F1/017, G02F1/2257 take precedence

Abstract

Method and apparatus for modulation of both the intensity and the polarization of radiation in silicon waveguides by applying a biasing voltage to the waveguide.

Claims

1. A polarization element comprising:

an insulating substrate;

a first conductive electrode; and

a first conductive waveguide formed on an insulating layer in contact with a surface of the substrate and electrically connected to the electrode, wherein a voltage is applied between the substrate and the electrode to bias the waveguide and thereby modulate radiation in the waveguide.

2. The polarization element of claim 1 further comprising a second grounded electrode which is electrically connected to a third conductive electrode or a second conductive waveguide.

3. The polarization element of claim 1 wherein the substrate is a silicon substrate.

4. The polarization element of claim 1, wherein the waveguide is a silicon channel formed on a silicon dioxide layer.

5. The polarization element of claim 1, wherein the substrate is grounded.

6. The polarization element of claim 1, wherein the waveguide is hydrophilic.

7. The polarization element of claim 1, wherein the waveguide is coated with a polymer containing an acid group.

8. The polarization element of claim 1, wherein the waveguide is coated with a spin-on glass.

9. The polarization element of claim 1, wherein the applied voltage varies with time.

11. The method of claim 9 further comprising providing a second grounded electrode which is electrically connected to a third conductive electrode or a second conductive waveguide.

12. The method of claim 9 wherein the substrate is a silicon substrate.

13. The method of claim 9, wherein the waveguide is a silicon channel formed on a silicon dioxide layer.

14. The method of claim 9, wherein the substrate is grounded.

15. The method of claim 9, wherein the waveguide is hydrophilic.

16. The method of claim 9, wherein the waveguide is coated with a polymer containing an acid group.

17. The method of claim 9, wherein the waveguide is coated with a spin-on glass.

18. The method of claim 9, wherein the applied voltage varies with time.

10. A method for control of radiation in a waveguide, the method comprising:

providing an insulating substrate;

providing a first conductive electrode;

providing a first conductive waveguide formed on an insulating layer in contact with a surface of the substrate and electrically connected to the electrode;

applying a voltage between the electrode and the substrate to bias the waveguide and thereby modulate radiation in the waveguide.