Methods And Systems For Forming Slots In A Semiconductor Substrate
First Claim
Patent Images
1. A method of fabricating a fluid feed slot in a print head substrate, comprising:
- making a cut into a first surface of a substrate using a cutting disk having a generally planar surface that is oriented generally perpendicular to the first surface; and
, removing material from a second surface of the substrate effective to form, in combination with said cut, a slot at least a portion of which passes entirely through the substrate.
0 Assignments
0 Petitions
Accused Products
Abstract
The described embodiments relate to methods and systems of forming slots in a semiconductor substrate. In one exemplary embodiment, a slot is formed by cutting with a disk into a semiconductor substrate into one of a first and second surfaces. A trench is created in the semiconductor substrate into the other of the first and second surfaces to form in combination with said cutting a slot through the substrate.
54 Citations
45 Claims
-
1. A method of fabricating a fluid feed slot in a print head substrate, comprising:
-
making a cut into a first surface of a substrate using a cutting disk having a generally planar surface that is oriented generally perpendicular to the first surface; and
,removing material from a second surface of the substrate effective to form, in combination with said cut, a slot at least a portion of which passes entirely through the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
-
-
13. A method of forming a fluid handling slot in a semiconductor substrate having first and second opposing surfaces and microelectronics integrated therein, comprising:
-
cutting with a circular saw into a semiconductor substrate into one of the first and second surfaces; and
,creating a trench in the semiconductor substrate into the other of the first and second surfaces to form in combination with said cutting a slot through the substrate. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
-
-
24. A method of forming slots in a semiconductor substrate containing microelectronics comprising:
-
removing material from a first side of the semiconductor substrate; and
,removing material from a second side of the semiconductor substrate wherein removing material from at least one of the first and second sides is accomplished with a mechanical cutting tool having a circular cutting disk revolving around an axis and where the cutting disk cuts the semiconductor substrate with the axis generally parallel to the first and second surfaces of the semiconductor substrate, and wherein at least portions of the removing from the first side and removing from the second side form a slot through the substrate material. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32)
-
-
33. A method of forming slots in a semiconductor substrate having first and second opposing surfaces comprising:
-
removing material from either a first or second surface; and
,making a mechanical cut into the other of the first or second surface effective to form in combination with said removing, a slot at least a portion of which passes entirely through the substrate, wherein the slot has an aspect ratio greater than or equal to one. - View Dependent Claims (34, 35, 36, 37, 38, 39, 40)
-
-
41. A method of forming slots in a semiconductor substrate having first and second opposing surfaces comprising:
-
making a cut into a first surface of a semiconductor substrate using a cutting tool, wherein the cutting tool has an axis of rotation generally parallel to the first surface; and
,removing material from a second surface of the semiconductor substrate effective to form, in combination with said cut, a slot at least a portion of which passes entirely through the semiconductor substrate. - View Dependent Claims (42)
-
-
43. A method of forming slots in a semiconductor substrate having first and second opposing surfaces comprising:
-
making a cut into a first surface of a semiconductor substrate using a cutting tool, wherein the cutting tool has an axis of rotation that is not perpendicular to the first surface; and
,removing material from a second surface of the semiconductor substrate effective to form, in combination with said cut, a slot at least a portion of which passes entirely through the substrate. - View Dependent Claims (44)
-
-
45. One or more computer-readable media having computer readable instructions thereon which, when executed by a computer, cause the computer to:
-
cause material to be removed from either the first or second surfaces of a semiconductor substrate; and
,cause a mechanical cut to be made into the other of the first or second surfaces of a semiconductor substrate effective to form in combination with said removing, a slot at least a portion of which passes entirely through the substrate.
-
Specification