Layered Surface Acoustic Wave Sensor

• US 20070241637A1
• Filed: 02/25/2005
• Published: 10/18/2007
• Est. Priority Date: 02/26/2004
• Status: Active Grant

• Current Assignee: MNT Innovations Pty., Ltd.
• Original Assignee: MNT Innovations Pty., Ltd.
• Inventors: Kalantar-Zadeh, Kourosh
• Granted Patent: US 7,482,732 B2
• Time in Patent Office: Days
• US Class Current: 310/313.D
• CPC Class Codes: G01N 2291/0255 (Bio)chemical reactions, e.g. on biosensors
• CPC Class Codes: G01N 2291/0256 Adsorption, desorption, surface mass change, e.g. on biosensors
• CPC Class Codes: G01N 2291/0423 Surface waves, e.g. Rayleigh waves, Love waves
• CPC Class Codes: G01N 2291/045 External reflections, e.g. on reflectors
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B
• CPC Class Codes: G01N 29/2462 Probes with waveguides, e.g. SAW devices

Abstract

A surface acoustic wave sensor which incorporates: a) a first layered SAW device consisting of a piezoelectric crystal such as lithium niobate or lithium tantalate with interdigital electrodes on its surface, and second piezoelectric layer such as zinc oxide over said interdigital electrodes b) a second layered SAW device consisting of a piezoelectric crystal with interdigital electrodes on its surface, a second piezoelectric layer over said interdigital electrodes and an analyte sensitive surface such as gold on said second piezoelectric layer c) both saw devices are fabricated on the same substrate d) reflectors are located adjacent the interdigital electrodes in each saw device to reduce the bandwidth of the device e) the resonator circuits of each saw sensor incorporate amplifiers which are dependent.

Claims

1. A biological sensor which incorporates

a) a first layered SAW device consisting of a piezoelectric crystal with interdigital electrodes on its surface, and second piezoelectric layer over said interdigital electrodes

b) a second layered SAW device consisting of a piezoelectric crystal with interdigital electrodes on its surface, a second piezoelectric layer over said interdigital electrodes and an analyte sensitive surface on said second piezoelectric layer

c) both saw devices are fabricated on the same substrate

d) reflectors are located adjacent the interdigital electrodes in each saw device to reduce the bandwidth of the device

e) the resonator circuits of each saw sensor incorporate amplifiers which are dependent.

2. A biological sensor as claimed in claim 1 in which the second layered device consists of a thin film layer with interdigital electrodes on its surface, a second piezoelectric layer over said interdigital electrodes and an analyte sensitive surface on said second piezoelectric layer.

3. A biological sensor as claimed in claim 1 in which the piezoelectric crystal is Lithium Niobate or Lithium Tantalate and the second piezoelectric layer is zinc oxide.

4. A biological sensor as claimed in claim 2 in which the analyte sensitive surface is gold.

5. A biological sensor as claimed in claim 2 in which the cavity length of the two SAW devices is not less than 90% of the centre to centre distance of the two devices.

6. A biological sensor as claimed in claim 2 in which the aperture size is approximately 200 wavelengths.

7. A biological sensor as claimed in claim 2 in which grooved gratings are used.