Fabry-perot tunable filter

• US 20070242358A1
• Filed: 04/18/2006
• Published: 10/18/2007
• Est. Priority Date: 04/18/2006
• Status: Abandoned Application

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Lin, Pinyen, Wang, Yao, Mestha, Lalit, Gulvin, Peter
• Application Number:
  US11/406,030
• Publication Number:
  US 20070242358A1
• Time in Patent Office: Days
• US Class Current: 359/578
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

A tunable Fabry-Perot filter is supported on a substrate which may be transparent. A transparent support body is supported by the substrate and carries a first reflector. A second reflector is supported on the substrate. The first and second reflectors define a gap therebetween. The size of the gap is adjustable by flexing of the support body to modulate a wavelength of light output by the filter.

Claims

1. A tunable Fabry-Perot filter comprising:

a substrate;

a support body supported by the substrate, the support body including a transparent support panel which is spaced from the substrate by first and second spaced leg members;

a first reflector supported on the substrate intermediate the first and second leg members;

a second reflector supported on the transparent support panel intermediate the first and second leg members, the first and second reflectors defining a gap therebetween; and

a driving member which adjusts a size of the gap by displacement of the support panel to modulate a wavelength of light output by the filter.

2. The Fabry-Perot filter of claim 1, wherein the substrate is transparent.

3. The Fabry-Perot filter of claim 2, wherein the substrate is formed from at least one of the group consisting of glass, quartz, and plastic.

4. The Fabry-Perot filter of claim 1, wherein the support body is flexible.

5. The Fabry-Perot filter of claim 1, wherein the support panel is primarily formed from an organic resin.

6. The Fabry-Perot filter of claim 5, wherein the support panel is formed from an epoxy resin.

7. The Fabry-Perot filter of claim 5, wherein the support body is integrally formed from an organic resin.

8. The Fabry-Perot filter of claim 1, wherein the first reflector is substantially coextensive with the support panel.

9. The Fabry-Perot filter of claim 1, wherein at least one of the first and second reflectors comprises a reflective metal film or a distributed Bragg reflector (DBR) mirror.

10. The Fabry-Perot filter of claim 1, wherein the driving member comprises a piezoelectric member which applies a force to the support panel.

11. The Fabry-Perot filter of claim 1, wherein the driving member comprises an electrostatic driving member.

12. A display apparatus comprising a plurality of the tunable Fabry-Perot filters of claim 1.

13. The display apparatus of claim 12, further comprising a modulator which provides wavelength modulation signals to the plurality of Fabry-Perot filters to modulate a color of pixels in an image.

14. The display apparatus of claim 13, wherein the modulator causes selected ones of the Fabry-Perot filters to shift into the bandwidth outside the visible range to modulate a brightness of pixels in the image.

15. The display apparatus of claim 12, further comprising a source of illumination which provides light to the plurality of Fabry-Perot filters.

16. A method of forming a Fabry-Perot filter comprising:

forming a first reflective layer on a surface of a substrate;

forming a sacrificial layer over the first reflective layer;

forming a second reflective layer over the sacrificial layer;

defining vias through the sacrificial layer;

forming a support body over the sacrificial layer which extends into the vias; and

removing the sacrificial layer to define a gap intermediate the first and second reflective layers.

17. The method of claim 16, wherein the forming of the support body comprises depositing an organic resin over the second layer of reflective material and in the vias.

18. The method of claim 17, wherein the organic resin comprises an epoxy resin.

19. The method of claim 16, wherein the sacrificial layer is formed from a material selected form the group consisting of organic photoresist materials, polysilicon, metals, and combinations thereof.

20. The method of claim 16, further comprising incorporating a driving member for selectively displacing the support body to adjust a size of the gap.

21. The method of claim 16, further comprising forming a plurality of the Fabry-Perot filters on the substrate.

22. A display system comprising:

an array of tunable Fabry-Perot filters supported on a common substrate, each of the filters comprising;

a resiliently flexible transparent support body supported by the substrate, the support body being formed of an organic resin;

a first reflector supported by the substrate; and

a second reflector supported by the transparent support body, the first and second reflectors defining a gap therebetween, a size of the gap being adjustable by flexing of the support body to modulate a wavelength of light output by the Fabry-Perot filter.