METHOD AND APPARATUS FOR THIN-FILM BATTERY HAVING ULTRA-THIN ELECTROLYTE
First Claim
1. A method of fabricating a thin-film battery, the method comprising:
- providing a substrate, the substrate including a current collector on a surface of the substrate;
forming an electrode first film on the current collector;
forming an electrolyte wherein the forming of the electrolyte includes forming a second film, wherein the second film includes LiPON, having a second-film-thickness of no more than about 1000 Angstroms deposited on the first film, wherein forming the second film includes;
depositing an electrolyte material using a first deposition source, and supplying energized particles from a second source such that the particles provide additional energy to the second film; and
forming the battery, wherein the battery includes the electrode first film, the electrolyte, and an electrode third film that contacts the electrolyte.
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Abstract
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists in controlling the growth and stoichiometry of the film. The method allows for the fabrication of ultrathin films such as electrolyte films and dielectric films.
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Citations
21 Claims
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1. A method of fabricating a thin-film battery, the method comprising:
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providing a substrate, the substrate including a current collector on a surface of the substrate;
forming an electrode first film on the current collector;
forming an electrolyte wherein the forming of the electrolyte includes forming a second film, wherein the second film includes LiPON, having a second-film-thickness of no more than about 1000 Angstroms deposited on the first film, wherein forming the second film includes;
depositing an electrolyte material using a first deposition source, and supplying energized particles from a second source such that the particles provide additional energy to the second film; and
forming the battery, wherein the battery includes the electrode first film, the electrolyte, and an electrode third film that contacts the electrolyte. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10)
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2. (canceled)
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11. An apparatus comprising:
a thin-film battery that includes;
a substrate;
an electrode first film deposited on the substrate;
an electrolyte that includes a second film deposited on the first film, wherein the electrolyte blocks the flow of electrons while permitting the flow of ions, and wherein the second film includes LiPON formed from an electrolyte material deposited in the presence of energized particles to form a desired second film structure; and
an electrode third film in electrical contact with the electrolyte;
wherein the second film is a thickness of less than about 1000 Angstroms.- View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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19. An apparatus for fabricating a thin-film battery, the apparatus comprising:
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means for providing a substrate, the substrate including a current collector on a surface of the substrate;
means for forming an electrode first film on the current collector;
means for forming an electrolyte wherein the means for forming of the electrolyte includes means for forming a second film, wherein the second film includes LiPON, having a second-film-thickness of no more than about 1000 Angstroms deposited on the first film, wherein the means for forming the second film includes;
means for depositing an electrolyte material using a first deposition source, and means for supplying energized particles from a second source such that the particles provide energy to the second film during its deposition; and
means for forming the battery, wherein the battery includes the electrode first film, the electrolyte, and an electrode third film that contacts the electrolyte. - View Dependent Claims (20, 21)
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Specification