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METHOD AND APPARATUS FOR THIN-FILM BATTERY HAVING ULTRA-THIN ELECTROLYTE

  • US 20070243459A1
  • Filed: 03/27/2007
  • Published: 10/18/2007
  • Est. Priority Date: 03/24/2000
  • Status: Active Grant
First Claim
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1. A method of fabricating a thin-film battery, the method comprising:

  • providing a substrate, the substrate including a current collector on a surface of the substrate;

    forming an electrode first film on the current collector;

    forming an electrolyte wherein the forming of the electrolyte includes forming a second film, wherein the second film includes LiPON, having a second-film-thickness of no more than about 1000 Angstroms deposited on the first film, wherein forming the second film includes;

    depositing an electrolyte material using a first deposition source, and supplying energized particles from a second source such that the particles provide additional energy to the second film; and

    forming the battery, wherein the battery includes the electrode first film, the electrolyte, and an electrode third film that contacts the electrolyte.

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