Microelectromechanical device and method utilizing a porous surface
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Abstract
A microelectromechanical device (MEMS) utilizing a porous electrode surface for reducing stiction is disclosed. In one embodiment, a microelectromechanical device is an interferometric modulator that includes a transparent electrode having a first surface; and a movable reflective electrode with a second surface facing the first surface. The movable reflective electrode is movable between a relaxed and actuated (collapsed) position. An aluminum layer is provided on either the first or second surface. The aluminum layer is then anodized to provide an aluminum oxide layer which has a porous surface. The porous surface, in the actuated position, decreases contact area between the electrodes, thus reducing stiction.
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Citations
31 Claims
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1. (canceled)
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2. A microelectromechanical systems (MEMS) device, comprising:
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a first electrode having a first surface; and
a second electrode having a second surface facing the first surface, the second electrode movable in a gap between a first position and a second position, the first position being a first distance from the first electrode, the second position being a second distance from the first electrode, the second distance being greater than the first distance, wherein at least one of the electrodes comprises a porous layer having a porous surface facing the other of the electrodes, wherein the porous surface is continuous while including a plurality of pores formed therethrough, and wherein the MEMS device serves as an interferometric modulator. - View Dependent Claims (3, 4, 5, 6, 7, 8, 11, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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9. A microelectromechanical systems (MEMS) device, comprising:
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a first electrode having a first surface; and
a second electrode having a second surface facing the first surface, the second electrode movable in a gap between a first position and a second position, the first position being a first distance from the first electrode, the second position being a second distance from the first electrode, the second distance being greater than the first distance, wherein at least one of the electrodes comprises a porous layer having a porous surface facing the other of the electrodes, wherein the porous surface is substantially continuous while including a plurality of pores formed therethrough, wherein the second electrode comprises the porous layer, wherein the second electrode comprises an aluminum reflective layer, wherein the porous layer is directly under the reflective layer, wherein the second electrode further comprises a nickel layer, and wherein the aluminum reflective layer is interposed between the nickel layer and the porous layer. - View Dependent Claims (10, 12, 13)
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29. An interferometric modulator, comprising:
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transmissive means for at least partially transmitting incident light, the transmissive means having a first surface;
reflective means for substantially reflecting incident light, the reflective means having a second surface facing the first surface; and
moving means for moving the reflective means relative to the transmissive means between a driven position and an undriven position, the driven position being closer to the transmissive means than is the undriven position, wherein at least one of the transmissive and reflective means comprises a porous surface facing the other of the transmissive and reflective means, and wherein the porous surface is continuous while including a plurality of pores formed therethrough. - View Dependent Claims (30)
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31-50. -50. (canceled)
Specification