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Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus

  • US 20070248439A1
  • Filed: 03/19/2007
  • Published: 10/25/2007
  • Est. Priority Date: 03/20/2006
  • Status: Active Grant
First Claim
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1. A vertical-type heat processing apparatus comprising:

  • a heat processing furnace;

    a holder capable of being loaded into the heat processing furnace and unloaded therefrom, with holding therein a plurality of objects to be processed at predetermined vertical intervals in a tier-like manner;

    a transfer mechanism including a base table capable of vertically moving and rotating, and a substrate supporter capable of horizontally moving on the base table; and

    a controller for controlling the transfer mechanism;

    wherein the transfer mechanism is adapted to transfer an object to be processed between a container containing a plurality of objects to be processed at predetermined intervals, and the holder;

    the substrate supporter includes a to-and-fro driving part for driving the substrate supporter in the horizontal direction, and a pitch-change driving part for changing a pitch at which the objects to be processed are supported;

    the controller is adapted to monitor at least one information of position, velocity and current fed back to a motor for driving the transfer mechanism, and the controller is adapted to judge. by comparing the monitored information with predetermined information corresponding to a normal drive, that the transfer mechanism is abnormally driven, and then is adapted to stop the drive of the transfer mechanism.

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