Non-planar surface structures and process for microelectromechanical systems
First Claim
1. A method of making a microelectromechanical system (MEMS) device, comprising:
- providing a substrate;
forming a first sacrificial layer over the substrate;
forming at least one aperture in the first sacrificial layer;
forming a second sacrificial layer over the first sacrificial layer and the at least one formed aperture;
forming an electrically conductive layer over the second sacrificial layer, thereby forming a non-planar interface between the electrically conductive layer and the second sacrificial layer; and
removing the first and second sacrificial layers to form a cavity between the substrate and the electrically conductive layer.
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Accused Products
Abstract
Methods of making MEMS devices including interferometric modulators involve depositing various layers, including stationary layers, movable layers and sacrificial layers, on a substrate. Apertures are formed in one or more of the various layers so as to form a non-planar surface on the movable and/or the stationary layers. Other layers may be formed over the formed apertures. Removal of the sacrificial layer from between the resulting non-planar movable and/or stationary layers results in a released MEMS device having reduced contact area and/or a larger surface separation between the movable and stationary layers when the MEMS device is actuated. The reduced contact area results in lower adhesion forces and reduced stiction during actuation of the MEMS device. These methods may be used to manufacture released and unreleased interferometric modulators.
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Citations
49 Claims
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1. A method of making a microelectromechanical system (MEMS) device, comprising:
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providing a substrate;
forming a first sacrificial layer over the substrate;
forming at least one aperture in the first sacrificial layer;
forming a second sacrificial layer over the first sacrificial layer and the at least one formed aperture;
forming an electrically conductive layer over the second sacrificial layer, thereby forming a non-planar interface between the electrically conductive layer and the second sacrificial layer; and
removing the first and second sacrificial layers to form a cavity between the substrate and the electrically conductive layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of making an interferometric modulator, comprising:
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providing a substrate;
forming a first layer over the substrate;
forming at least one aperture in the first layer;
forming a second layer over at least a portion of the first layer and the at least one aperture, wherein the first layer is thinner than the second layer as measured perpendicular to the substrate;
forming a sacrificial layer over at least a portion of the second layer, thereby forming a non-planar interface between the sacrificial layer and the second layer; and
forming an electrically conductive layer over the sacrificial layer, the sacrificial layer being removable to thereby form a cavity between the second layer and the electrically conductive layer. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. An unreleased microelecromechanical system (MEMS) device, comprising:
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a substrate;
a discontinuous first layer over the substrate, the discontinuous first layer comprising at least one aperture;
a second layer continuous over at least a portion of the discontinuous first layer and the at least one aperture, wherein the first layer is thinner than the second layer as measured perpendicular to the substrate;
a sacrificial layer over at least a portion of the second layer;
a non-planar interface between the sacrificial layer and the second layer; and
an electrically conductive layer over the sacrificial layer;
the sacrificial layer being removable to thereby form a cavity between the second layer and the electrically conductive layer. - View Dependent Claims (27, 28, 29, 30, 31, 32)
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33. An interferometric modulator, comprising:
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first means for reflecting light;
a second means for reflecting light, wherein the second means for reflecting light is capable of moving towards the first reflecting means in an actuated state;
means for reducing stiction between the first reflecting means and the second reflecting means in the actuated state, while simultaneously not substantially affecting optical properties; and
means for supporting the second reflecting means. - View Dependent Claims (34, 35, 36, 37)
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38. An interferometric modulator, comprising:
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a substrate;
a first discontinuous layer over at least a portion of the substrate, the discontinuous first layer comprising at least one aperture;
a second layer continuous over at least a portion of the first discontinuous layer and the at least one aperture, the second layer comprising a non-planar surface, wherein the first discontinuous layer is thinner than the second layer as measured perpendicular to the substrate;
an electrically conductive layer separated from the second layer by a cavity; and
a support structure arranged over the substrate and configured to support the electrically conductive layer. - View Dependent Claims (39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49)
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Specification