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Non-planar surface structures and process for microelectromechanical systems

  • US 20070249078A1
  • Filed: 04/19/2006
  • Published: 10/25/2007
  • Est. Priority Date: 04/19/2006
  • Status: Abandoned Application
First Claim
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1. A method of making a microelectromechanical system (MEMS) device, comprising:

  • providing a substrate;

    forming a first sacrificial layer over the substrate;

    forming at least one aperture in the first sacrificial layer;

    forming a second sacrificial layer over the first sacrificial layer and the at least one formed aperture;

    forming an electrically conductive layer over the second sacrificial layer, thereby forming a non-planar interface between the electrically conductive layer and the second sacrificial layer; and

    removing the first and second sacrificial layers to form a cavity between the substrate and the electrically conductive layer.

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