Systems and Methods for Monitoring and Controlling Dispense Using a Digital Optical Sensor

• US 20070251450A1
• Filed: 04/28/2006
• Published: 11/01/2007
• Est. Priority Date: 04/28/2006
• Status: Abandoned Application

• Current Assignee: SOKUDO Co., Ltd. (SCREEN Holdings Co., Ltd.)
• Original Assignee: Applied Materials Incorporated
• Inventors: LIN, Y. Sean
• Application Number:
  US11/380,910
• Publication Number:
  US 20070251450A1
• Time in Patent Office: Days
• US Class Current: 118/684
• CPC Class Codes: H01L 21/6715 Apparatus for applying a liquid, a resin, an ink or the like H01L21/67126 takes precedence
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring

Abstract

A device for detection of a semiconductor process liquid is provided. The device includes a light source adapted to generate a light beam and a digital optical sensor to detect the light beam. A nozzle is adapted to support the semiconductor process liquid and transmit the light beam. The nozzle and the source are arranged to refract the beam in a first direction while the beam passes through a gas disposed in the nozzle. The nozzle and source are arranged to refract the beam in a second direction while the beam passes through the liquid.

Claims

1. A device for detection of a semiconductor process liquid, the device comprising:

a light source adapted to generate a light beam;

a digital optical sensor to detect the light beam; and

a nozzle adapted to support the semiconductor process liquid and transmit the light beam, the nozzle and the source arranged to refract the beam in a first direction while the beam passes through a gas disposed in the nozzle and to refract the beam in a second direction while the beam passes through the liquid.

2. The device of claim 1 wherein the first direction is toward the sensor and the second direction is away from the sensor.

3. The device of claim 1 wherein the sensor is offset from the beam transmitted in the second direction.

4. The device of claim 1 wherein the sensor generates first digital signal in response to liquid present in the nozzle and a second digital signal in response to gas present in the nozzle.

5. The device of claim 1 further comprising a support to support the nozzle, the source and the sensor, the support rigidly attached to the source and the sensor, the support adapted to permit removal and replacement of the nozzle while the source and the sensor remain attached to the support.

6. A device for detecting delivery errors with a semiconductor process liquid, the device comprising:

a nozzle to deliver the liquid, the nozzle comprising a tip;

a flow valve coupled to the nozzle to dispense the liquid through the nozzle;

a suck back valve to suck the liquid back from the nozzle tip;

a digital optical sensor to detect the liquid or a gas in the nozzle, the sensor adapted to generate a first signal while liquid is disposed in the nozzle and a second signal while a gas is disposed in the nozzle;

a processor coupled to the sensor, the processor adapted to generate an error signal in response to the second signal from the sensor while the flow valve dispenses liquid through the nozzle and/or in response to the first signal from the sensor while the suck back valve has sucked the liquid back from the tip.

7. The device of claim 6 wherein the sensor generates the first signal in response to liquid in the nozzle while the nozzle dispenses the liquid and generates the second signal in response to gas in the nozzle while the suck back valve has sucked the liquid back from the tip.

8. The device of claim 6 wherein the digital optical sensor comprises an adjustable threshold, wherein the threshold has been adjusted to generate the first signal or the second signal in response to a level of the liquid in the nozzle.

9. The device of claim 6 wherein the processor is adapted to generate the error signal in response to the second signal from the sensor while suck back valve has reset the liquid toward the tip and the flow valve remains closed.

10. The device of claim 9 wherein the liquid remains reset toward the tip for a period of time and the flow valve remains closed for the period of time, and wherein the sensor generates the first signal or the second signal in the time period.

11. The device of claim 6 wherein the processor is adapted to generate an error signal in response to the second signal from the sensor while the flow valve has stopped the liquid in the nozzle before the suck back valve sucks the liquid back from the tip.

12. The device of claim 11 wherein the liquid remains stopped in the nozzle for a period of time before the suck back valve sucks the liquid back from the tip and the sensor generates the first signal or the second signal in the time period.

13. The device of claim 6 further comprising:

a light source to generate a light beam; and

wherein at least a portion of the nozzle refracts the light beam away from the sensor while the beam passes through the liquid, and wherein the portion of the nozzle transmits the beam toward the sensor while the beam passes through the gas.

14. A method of applying a semiconductor process liquid through a nozzle, the method comprising:

opening a flow valve to dispense the liquid through the nozzle;

closing the flow valve to stop the liquid in the nozzle at a first level, the first level near a tip of the nozzle;

drawing the liquid back from the first level toward a second level away from the tip with a suck back valve while the flow valve remains closed; and

advancing the liquid from the second level to the first level with the suck back valve to reset liquid at the first level.

15. The method of claim 14 wherein the first level is flush with the tip of the nozzle.

16. The method of claim 14 wherein the flow valve remains closed with the fluid stopped in the nozzle for a period of time before the liquid is drawn toward the second level.

17. The method of claim 14 wherein the flow valve remains closed with the fluid stopped in the nozzle for a period of time after the suck back valve has reset the liquid at the first level.

18. A device for dispensing a semiconductor process liquid, the device comprising:

a light source to generate a light beam;

a digital optical sensor to detect the light beam;

a nozzle having a channel formed therein to dispense the liquid, the nozzle adapted to support the semiconductor process liquid and transmit the light beam, the nozzle and source arranged to refract the light beam in a first direction while a gas is disposed in the channel near the tip of the nozzle, the nozzle and source arranged to refract the light beam in a second direction while the liquid is disposed in the channel near a tip of the nozzle;

a flow valve to control a flow of the liquid through the nozzle, the flow valve open to dispense liquid through the nozzle and closed to stop the liquid in the nozzle near the tip;

a suck back valve adapted to suck the liquid back from the nozzle tip; and

a processor connected to the digital sensor, the flow valve and the suck back valve, the processor adapted to sequentially close the flow valve to stop the liquid for a period of time and open the suck back valve after the period of time while the flow valve remains closed, the processor adapted to generate an error signal in response to the beam refracted in the first direction in the time period and the gas detected with the sensor.

19. The device of claim 18 wherein the first direction is toward the sensor and the second direction is away from the sensor.

20. The device of claim 18 wherein the processor generates an error signal in response to liquid detected with the sensor after the liquid has been sucked back from the tip while the flow valve remains closed and the nozzle remains idle.

21. The device of claim 20 wherein the suck back valve resets the liquid toward the tip after the nozzle has remained idle and the liquid remains reset toward the tip for a period of time, and wherein the processor generates an error signal in response to air detected with the sensor in the time period.