Fluid distribution system
First Claim
Patent Images
1. A fluid distribution system for supplying fluid to a point of use comprising:
- a fluid source;
a first engine adapted to receive fluid from the fluid source and to distribute fluid to the point of use; and
a second engine identical to the first engine, the second engine being adapted to receive fluid from the fluid source and to distribute fluid to the point of use;
wherein the fluid distribution system does not have any single point failures.
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Abstract
The present invention provides a method and apparatus for bulk fluid distribution. In particular, the invention provides a method and apparatus for distributing fluids in a semiconductor manufacturing plant (e.g. a 300 mm fab). The invention meets the performance and uptime requirements of semiconductor manufacturers including increased capacity and pressure control as compared to known fluid distribution systems, and can satisfy the requirements of “no single point failures” and “no planned downtime.”
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Citations
28 Claims
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1. A fluid distribution system for supplying fluid to a point of use comprising:
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a fluid source; a first engine adapted to receive fluid from the fluid source and to distribute fluid to the point of use; and a second engine identical to the first engine, the second engine being adapted to receive fluid from the fluid source and to distribute fluid to the point of use; wherein the fluid distribution system does not have any single point failures. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A fluid distribution system comprising:
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a main module; a day tank module; a fluid source; a point of use; a first engine adapted to receive fluid from each of the main module, the day tank module and the fluid source and adapted to dispense fluid to each of the day tank module, the fluid source and the point of use; and a second engine adapted to receive fluid from each of the main module, the day tank module and the fluid source and adapted to dispense fluid to each of the day tank module, the fluid source and the point of use; wherein the fluid distribution system does not have any single point failures. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A method of distributing fluid to a point of use comprising:
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distributing fluid to the point of use with a first engine; filtering fluid in a day tank with a second engine; and filtering fluid in a supply drum with a third engine; wherein each of the first, second and third engines is adapted to perform the steps of distributing fluid to the point of use, filtering fluid in the day tank and filtering fluid in the supply drum. - View Dependent Claims (27, 28)
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Specification