Semiconductor device and method of manufacturing the same
First Claim
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1. A semiconductor device comprising:
- a substrate;
an active layer including a composite represented by Formula 1 below, on the substrate;
source and drain electrodes electrically connected to the active layer;
a gate electrode on the active layer; and
a gate insulating layer between the gate electrode and the active layer;
x(Ga2O3)·
y(In2O3)·
z(ZnO)
Formula 1wherein, about 0.75≦
x/z≦
about 3.15, and about 0.55≦
y/z≦
about 1.70.
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Abstract
A semiconductor device may include a composite represented by Formula 1 below as an active layer.
x(Ga2O3)·y(In2O3)·z(ZnO) Formula 1wherein, about 0.75≦x/z≦about 3.15, and about 0.55≦y/z≦about 1.70. Switching characteristics of displays and driving characteristics of driving transistors may be improved by adjusting the amounts of a gallium (Ga) oxide and an indium (In) oxide mixed with a zinc (Zn) oxide and improving optical sensitivity.
109 Citations
23 Claims
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1. A semiconductor device comprising:
-
a substrate;
an active layer including a composite represented by Formula 1 below, on the substrate;
source and drain electrodes electrically connected to the active layer;
a gate electrode on the active layer; and
a gate insulating layer between the gate electrode and the active layer;
x(Ga2O3)·
y(In2O3)·
z(ZnO)
Formula 1wherein, about 0.75≦
x/z≦
about 3.15, and about 0.55≦
y/z≦
about 1.70. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of manufacturing a semiconductor device, the method comprising:
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forming an active layer including a composite represented by Formula 1 below, source and drain electrodes, a gate insulating layer and a gate electrode on a substrate,
x(Ga2O3)·
y(In2O3)·
z(ZnO)
Formula 1wherein, about 0.75≦
x/z≦
about 3.15, and about 0.55≦
y/z≦
about 1.70. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification