Optical coupling structure
First Claim
1. An optical coupling structure, comprising:
- a silicon-on-insulator substrate comprising a top side and a bottom side, wherein a buried oxide layer is interposed between the top side and the bottom side;
a wave guide formed on the top side; and
a prism formed on the bottom side, wherein a portion of the buried oxide layer serves as a spacer between the prism and the waveguide.
1 Assignment
0 Petitions
Accused Products
Abstract
An optoelectronic coupling structure, a method of manufacture, and a method of operation are described. The optical coupling structure includes a waveguide that is formed within a device layer of an SOI substrate. A prism is located on a bottom side of the SOI substrate. A BOX layer of the SOI substrate, which is interposed between the prism and the waveguide, serves as a spacer region, which promotes an optical coupling of the prism to the waveguide. By positioning the prism below the waveguide, an optoelectronic IC may more readily accommodate a prism. The prism may be directly fabricated in a bulk layer of the SOI substrate or directly bonded to a bottom side surface of the BOX layer.
152 Citations
22 Claims
-
1. An optical coupling structure, comprising:
-
a silicon-on-insulator substrate comprising a top side and a bottom side, wherein a buried oxide layer is interposed between the top side and the bottom side;
a wave guide formed on the top side; and
a prism formed on the bottom side, wherein a portion of the buried oxide layer serves as a spacer between the prism and the waveguide. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A method for making an optical coupling structure, the method comprising:
-
providing a silicon-on-insulator substrate that includes a top side and a bottom side, wherein a buried oxide layer is interposed between the top side and the bottom side;
forming a waveguide on the top side; and
forming a prism on the bottom side, wherein a portion of the buried oxide layer establishes a spacing between the prism and the waveguide. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16)
-
- 17. A method for operating an optical coupling structure, comprising using a portion of buried oxide layer of a silicon-on-insulator substrate to promote a coupling of light between a bottom side of the silicon-on-insulator substrate and a top side of the silicon-on-insulator substrate.
-
20. An optical coupling structure, comprising:
-
a silicon-on-insulator substrate including a top side and a bottom side, wherein a buried oxide layer is interposed between the top side and the bottom side of the silicon-on-insulator substrate; and
a first device located on the bottom side of the silicon-on-insulator substrate, wherein a portion of the buried oxide layer promotes an optical coupling of the first device to at least one device located on the top side of the silicon-on-insulator substrate. - View Dependent Claims (21, 22)
-
Specification