Method of Making a Microelectronic and/or Optoelectronic Circuitry Sheet
First Claim
1. A method of defining at least one defined feature in a substrate, comprising:
- a) providing a substrate;
b) applying a first lower photoresist layer on said substrate;
c) applying a first upper photoresist layer on said first lower photoresist layer so as to form a first photoresist stack;
d) exposing said first upper photoresist layer through a first mask;
e) exposing said first lower photoresist layer through a second mask and through said first upper photoresist layer simultaneously with said exposing of said first upper photoresist layer with said first mask so as to impart a first image of at least one first structure into said first photoresist stack;
f) developing said first upper photoresist layer and said first lower photoresist layer so that openings form in each of said first upper photoresist layer and said first lower photoresist layer to define said at least one first structure in said first photoresist stack; and
g) performing an etch to transfer said at least one first structure formed in said first photoresist stack into said substrate so as to form a first defined feature in said substrate.
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Accused Products
Abstract
A circuitry sheet comprising an electronic device layer stack containing electronic devices, e.g., thin-film transistors, or portions thereof, formed by removing material from both sides of the device layer stack. The circuitry sheet may be made by an electronic/optoelectronic device manufacturing method that includes the steps of forming the device layer stack on a temporary substrate removing material from both sides of the device layer stack, and then attaching a permanent substrate to the device layer stack. The method uses one or more resist layers that may be activated simultaneously and independently to impart distinct circuit pattern images into each of a plurality of image levels within each resist layer, thereby obviating repetitive sequential exposure, registration and alignment steps.
94 Citations
38 Claims
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1. A method of defining at least one defined feature in a substrate, comprising:
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a) providing a substrate;
b) applying a first lower photoresist layer on said substrate;
c) applying a first upper photoresist layer on said first lower photoresist layer so as to form a first photoresist stack;
d) exposing said first upper photoresist layer through a first mask;
e) exposing said first lower photoresist layer through a second mask and through said first upper photoresist layer simultaneously with said exposing of said first upper photoresist layer with said first mask so as to impart a first image of at least one first structure into said first photoresist stack;
f) developing said first upper photoresist layer and said first lower photoresist layer so that openings form in each of said first upper photoresist layer and said first lower photoresist layer to define said at least one first structure in said first photoresist stack; and
g) performing an etch to transfer said at least one first structure formed in said first photoresist stack into said substrate so as to form a first defined feature in said substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method of defining at least one defined feature in a substrate, comprising:
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a) providing a substrate;
b) applying a first unitary photoresist layer on said substrate;
c) exposing said first unitary photoresist layer through a first mask;
d) exposing said first unitary photoresist layer through a second mask simultaneously with said exposing of said first unitary photoresist layer with said first mask so as to impart an image of at least one first structure into said first unitary photoresist layer;
e) developing said first unitary photoresist layer to define said at least one first structure; and
f) performing an etch to transfer said at least one first structure formed in said first unitary photoresist layer into said substrate so as to form a first defined feature in said substrate. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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Specification