Contoured CMP pad dresser and associated methods

• US 20070254566A1
• Filed: 04/10/2007
• Published: 11/01/2007
• Est. Priority Date: 11/22/1999
• Status: Abandoned Application

• Current Assignee: Chien-Min Sung
• Original Assignee: Chien-Min Sung
• Inventors: Sung, Chien-Min
• Application Number:
  US11/786,443
• Publication Number:
  US 20070254566A1
• Time in Patent Office: Days
• US Class Current: 451/443
• CPC Class Codes: B24B 53/017 Devices or means for dressing, cleaning or otherwise conditioning lapping tools
• CPC Class Codes: B24B 53/12 Dressing tools; Holders therefor
• CPC Class Codes: B24D 18/00 Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
• CPC Class Codes: B24D 2203/00 Tool surfaces formed with a pattern
• CPC Class Codes: B24D 3/06 metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
• CPC Class Codes: B24D 7/02 Wheels in one piece

Abstract

CMP pad dressers with increased pad dressing work loads on the centrally located abrasive particles during dressing of a CMP pad, and methods associated therewith are disclosed and described. The increase in work load on centralized particles improves pad dressing performance and also extends the service life of the pad dresser.

Claims

1. A method of increasing work load on centrally located superabrasive particles in a CMP pad dresser during dressing of a CMP pad with the dresser comprising:

providing a brazing alloy sheet;

coating the brazing alloy sheet with an adhesive;

positioning the superabrasive particles in the adhesive on the brazing alloy sheet in a pattern that reduces penetration of peripherally located particles into the CMP pad and increases penetration of centrally located particles into the CMP pad; and

brazing the particles to a substrate with the brazing alloy to form the dresser.

2. The method of claim 1, wherein the superabrasive particles are positioned on the brazing alloy using a template placed directly on the sheet of brazing alloy.

3. The method of claim 1, wherein the superabrasive particles are positioned on the brazing alloy using a transfer sheet having an adhesive coated thereon and having received the superabrasive particles in the pattern by use of a template.