SERVICE ACTIVITY MANAGEMENT SYSTEM AND METHOD FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
First Claim
1. An activity management system for managing service activities relating to semiconductor manufacturing comprising:
- a data collection system configured to receive service activity data relating to at least one of a service component, a service operator, and a service account;
a data storage system coupled to said data collection system and configured to store said service activity data; and
a service action system coupled to said data collection system and said data storage system, and configured to provide service action data using said service activity data by performing a plurality of service functions comprising at least providing service component repair for a semiconductor manufacturing component, providing service component start-up for a semiconductor manufacturing component, providing service component preventative maintenance for a semiconductor manufacturing component, providing service component cleaning for a semiconductor manufacturing component, providing service component revisions for a semiconductor manufacturing component, providing service component enhancements for a semiconductor manufacturing component, providing service component de-installation for a semiconductor manufacturing component, providing service education for a semiconductor manufacturing component, and providing service collaboration for a semiconductor manufacturing componentswherein a graphical user interface of the service action system includes a single menu screen allowing user access to all service functions performed by the service action system.
1 Assignment
0 Petitions
Accused Products
Abstract
An activity management system, and a method of using thereof, is described for a service process in semiconductor manufacturing. The activity management system includes a data collection system configured to receive service activity data associated with at least one service component and a service operator, and relate the service activity data with at least one service account. Additionally, the activity management system includes a data storage system coupled to the data collection system and configured to store the service activity data. Furthermore, the activity management system includes a service action system coupled to the data collection system and the data storage system, and configured to perform at least one service function including service component repair, service component start-up, service component preventive maintenance, service component cleaning, service component revision (e.g., a field change notice), a service component enhancement (e.g., a continuous improvement notice), service component de-installation, a customer action plan, a project action plan, and service education.
-
Citations
38 Claims
-
1. An activity management system for managing service activities relating to semiconductor manufacturing comprising:
-
a data collection system configured to receive service activity data relating to at least one of a service component, a service operator, and a service account; a data storage system coupled to said data collection system and configured to store said service activity data; and a service action system coupled to said data collection system and said data storage system, and configured to provide service action data using said service activity data by performing a plurality of service functions comprising at least providing service component repair for a semiconductor manufacturing component, providing service component start-up for a semiconductor manufacturing component, providing service component preventative maintenance for a semiconductor manufacturing component, providing service component cleaning for a semiconductor manufacturing component, providing service component revisions for a semiconductor manufacturing component, providing service component enhancements for a semiconductor manufacturing component, providing service component de-installation for a semiconductor manufacturing component, providing service education for a semiconductor manufacturing component, and providing service collaboration for a semiconductor manufacturing components wherein a graphical user interface of the service action system includes a single menu screen allowing user access to all service functions performed by the service action system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
-
-
21. A method of using an activity management system to assist in performing a service action relating to semiconductor manufacturing comprising:
-
providing a data collection system configured to interact with a service operator and collect service activity data from said service operator, wherein said service activity data is associated with at least one of a service operator, a service component, and a service account; providing a data storage system coupled to said data collection system, and configured to store said service activity data; providing a service action system coupled to said data collection system and said data storage system, and configured to interact with said service operator to provide service action data to said service operator using said service activity data stored in said data storage system in order to perform a plurality of service functions comprising at least service component repair for a semiconductor manufacturing component, providing service component start-up for a semiconductor manufacturing component, providing service component preventative maintenance for a semiconductor manufacturing component, providing service component cleaning for a semiconductor manufacturing component, providing service component revisions for a semiconductor manufacturing component, providing service component enhancements for a semiconductor manufacturing component, providing service component de-installation for a semiconductor manufacturing component, providing service education for a semiconductor manufacturing component, and providing service collaboration for a semiconductor manufacturing component; providing a graphical user interface including a single menu screen allowing user access to all service functions performed by the service action system; and utilizing said service action data to perform a service action.
-
-
22. An activity management system for managing service activities relating to semiconductor manufacturing comprising:
-
a data collection system configured to collect service activity data relating to semiconductor manufacturing services; a data storage system coupled to said data collection system and configured to store said service activity data; a service action system coupled to said data collection system and data storage system and configured to perform a service component service function for a semiconductor manufacturing component and a non-service component service function for the semiconductor manufacturing component in order to assist a service operator in performing a service action for the semiconductor manufacturing component; and a display configured to display a graphical user interface including a single menu screen allowing user access to all service functions performed by the service action system. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29)
-
-
30. A method of using a computer system to manage service activities relating to semiconductor manufacturing comprising:
-
using said computer system to collect service activity data relating to semiconductor manufacturing services; using said computer system to store said service activity data; and displaying a graphical user interface including a single menu screen allowing user access to all service functions performed by the computer system; using said computer system to perform a service component service function for a semiconductor manufacturing component and a non-service component service function for the semiconductor manufacturing component based on a service function selected from the graphical user interface; and performing a service action for the semiconductor manufacturing component based on results of said service component or non-service component service function. - View Dependent Claims (31, 32, 33, 34, 35, 36)
-
-
37. A computer readable medium containing program instructions for execution on a processor, which when executed by the processor, cause a computer system to perform a method comprising:
-
using said computer system to collect service activity data relating to semiconductor manufacturing services; using said computer system to store said service activity data; and displaying a graphical user interface including a single menu screen allowing user access to all service functions performed by the computer system; using said computer system to perform a service component service function for a semiconductor manufacturing component and a non-service component service function for the semiconductor manufacturing component based on a service function selected from the graphical user interface; and performing a service action for the semiconductor manufacturing component based on results of said service component or non-service component service function.
-
-
38. An activity management system for managing service activities relating to semiconductor manufacturing comprising:
-
means for collecting service activity data relating to semiconductor manufacturing services; means for storing said service activity data coupled to said means for collecting; means, coupled to said means for collecting and said means for storing, for performing a service component service function for a semiconductor manufacturing component and a non-service component service function for the semiconductor manufacturing component in order to assist a service operator in performing a service action for the semiconductor manufacturing component, said service actions including at least providing service component repair for a semiconductor manufacturing component, providing service component start-up for a semiconductor manufacturing component, providing service component preventative maintenance for a semiconductor manufacturing component, providing service component cleaning for a semiconductor manufacturing component, providing service component revisions for a semiconductor manufacturing component, providing service component enhancements for a semiconductor manufacturing component, providing service component de-installation for a semiconductor manufacturing component, providing service education for a semiconductor manufacturing component, and providing service collaboration for a semiconductor manufacturing component; and display means for displaying a graphical user interface including a single menu screen allowing user access to all service functions performed by the means for performing a service component service function.
-
Specification