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APPARATUS FOR ETCHING HIGH ASPECT RATIO FEATURES

  • US 20070256786A1
  • Filed: 05/31/2006
  • Published: 11/08/2007
  • Est. Priority Date: 05/03/2006
  • Status: Active Grant
First Claim
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1. A showerhead assembly, comprising:

  • a gas distribution plate having an outer set of gas flow holes, an inner set of gas flow holes, and a set of optical metrology holes;

    an upper section coupled to the gas distribution plate and having a first plenum fluidly coupled to the outer set of gas flow holes and a second plenum fluidly coupled to the inner set of gas flow holes, the plenums being fluidly isolated within the upper section; and

    a ceramic plug disposed through the upper section and having an optically transmissive region aligned with the optical metrology holes.

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