Nonvolatile memory device including amorphous alloy metal oxide layer and method of manufacturing the same
First Claim
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1. A nonvolatile memory device, comprising:
- a lower electrode;
an amorphous alloy metal oxide layer disposed on the lower electrode; and
a upper electrode disposed on the amorphous alloy metal oxide layer.
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Abstract
A nonvolatile memory device may include a lower electrode, an oxide layer including an amorphous alloy metal oxide disposed on the lower electrode, and a diode structure disposed on the oxide layer.
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16 Claims
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1. A nonvolatile memory device, comprising:
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a lower electrode;
an amorphous alloy metal oxide layer disposed on the lower electrode; and
a upper electrode disposed on the amorphous alloy metal oxide layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of manufacturing a nonvolatile memory device, comprising:
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forming a lower electrode;
forming an amorphous alloy metal oxide layer on the lower electrode; and
forming an upper electrode on the amorphous metal alloy layer. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification