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System and Apparatus for Repairing Micromirrors in Spatial Light Modulators

  • US 20070258129A1
  • Filed: 07/06/2007
  • Published: 11/08/2007
  • Est. Priority Date: 02/28/2005
  • Status: Active Grant
First Claim
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1. A projection system comprising:

  • a light source producing illumination light;

    a spatial light modulator for modulating the illumination light, comprising an array of micromirrors each comprising a deflectable mirror plate and an addressing electrode;

    a controller in connection with the spatial light modulator, comprising first means for switching the micromirrors between an ON and OFF state, second means for applying a number of refresh voltage pulses to the mirror plates so as to repair a stuck micromirror, and wherein a ratio of the number of switches of the micromirrors between the ON and OFF states to the number of refresh voltage pulses is greater than 1; and

    a display target on which the modulated light from the spatial light modulator is projected.

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