Deformable mirror device
First Claim
Patent Images
1. A deformable mirror device, comprising:
- a flexible member formed so as to be deformable and having a mirror surface formed on its front surface; and
pressure generating means configured so that a direction of generation of a pressure to be applied to the flexible member is variable.
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Abstract
A deformable mirror device includes a flexible member formed so as to be deformable and having a mirror surface formed on its front surface, and a pressure generating section configured so that a direction of generation of a pressure to be applied to the flexible member is variable.
32 Citations
8 Claims
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1. A deformable mirror device, comprising:
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a flexible member formed so as to be deformable and having a mirror surface formed on its front surface; and
pressure generating means configured so that a direction of generation of a pressure to be applied to the flexible member is variable. - View Dependent Claims (2, 3, 4, 5, 6)
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7. An optical pickup apparatus comprising:
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an objective lens;
a semiconductor laser;
a detector; and
a deformable mirror device, wherein the deformable mirror device includes a flexible member formed so as to be deformable and having a mirror surface formed on its front surface, and pressure generating means configured so that a direction of generation of a pressure to be applied to the flexible member is variable.
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8. A deformable mirror device, comprising:
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a flexible member formed so as to be deformable and having a mirror surface formed on its front surface; and
a pressure generating section configured so that a direction of generation of a pressure to be applied to the flexible member is variable.
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Specification