Method, program product and apparatus for obtaining short-range flare model parameters for lithography simulation tool
First Claim
1. A method of obtaining short-range flare model parameters representing a short-range flare which degrades a contrast of an image generated by a lithography tool, comprising the steps of:
- measuring short-range flare from the image to obtain measured short-range flare data;
performing a simulation based on short-range flare model parameters to obtain simulated short-range flare data;
comparing the simulated short-range flare data with the measured short range flare data;
determining whether the short-range flare model parameters used in the simulation is appropriate based on the comparison result; and
optimizing the short-range flare model parameters according to the measured short-range data and the simulated short-range flare data if the short-range flare model parameters used for the simulation is not appropriate.
2 Assignments
0 Petitions
Accused Products
Abstract
A process of obtaining short-range flare model parameters representing a short-range flare which degrades a contrast of an image generated by a lithography tool, is disclosed. Short-range flare is measured from the image to obtain measured short-range flare data. A simulation is performed based on short-range flare model parameters to obtain simulated short-range flare data. The simulated short-range flare data is compared with the measured short range flare data. It is determined whether the short-range flare model parameters used in the simulation is appropriate based on the comparison result. The short-range flare model parameters is optimized according to the measured short-range data and the simulated short-range flare data if the short-range flare model parameters used for the simulation is not appropriate.
-
Citations
14 Claims
-
1. A method of obtaining short-range flare model parameters representing a short-range flare which degrades a contrast of an image generated by a lithography tool, comprising the steps of:
-
measuring short-range flare from the image to obtain measured short-range flare data;
performing a simulation based on short-range flare model parameters to obtain simulated short-range flare data;
comparing the simulated short-range flare data with the measured short range flare data;
determining whether the short-range flare model parameters used in the simulation is appropriate based on the comparison result; and
optimizing the short-range flare model parameters according to the measured short-range data and the simulated short-range flare data if the short-range flare model parameters used for the simulation is not appropriate. - View Dependent Claims (2, 3, 4, 5, 6)
-
-
7. A computer program product having a computer readable medium bearing a computer program for obtaining short-range flare model parameters representing a short-range flare which degrades a contrast of an image generated by a lithography tool, the computer program, when executed, causing a computer to perform the steps of:
-
measuring short-range flare from the image to obtain measured short-range flare data;
performing a simulation based on short-range flare model parameters to obtain simulated short-range flare data;
comparing the simulated short-range flare data with the measured short range flare data;
determining whether the short-range flare model parameters used in the simulation is appropriate based on the comparison result; and
optimizing the short-range flare model parameters according to the measured short-range data and the simulated short-range flare data if the short-range flare model parameters used for the simulation is not appropriate. - View Dependent Claims (8, 9, 10)
-
-
11. An apparatus for obtaining short-range flare model parameters representing a short-range flare which degrades a contrast of an image generated by a lithography tool, the apparatus comprising:
-
a first unit configured for measuring short-range flare from the image to obtain measured short-range flare data;
a second unit configured for performing a simulation based on short-range flare model parameters to obtain simulated short-range flare data;
a third unit configured for comparing the simulated short-range flare data with the measured short range flare data;
a fourth unit configured for determining whether the short-range flare model parameters used in the simulation is appropriate based on the comparison result; and
a fifth unit configured for optimizing the short-range flare model parameters according to the measured short-range data and the simulated short-range flare data if the short-range flare model parameters used for the simulation is not appropriate. - View Dependent Claims (12, 13, 14)
-
Specification