Analysis of a reactive gas such as silane for particle generating impurities

• US 20070261559A1
• Filed: 05/09/2006
• Published: 11/15/2007
• Est. Priority Date: 05/09/2006
• Status: Abandoned Application

• Current Assignee: Versum Materials US, LLC (Merck & Co., Inc.)
• Original Assignee: Versum Materials US, LLC (Merck & Co., Inc.)
• Inventors: McDermott, Wayne, Maroulis, Peter, Ketkar, Suhas
• Application Number:
  US11/430,614
• Publication Number:
  US 20070261559A1
• Time in Patent Office: Days
• US Class Current: 96/417
• CPC Class Codes: C23C 16/4402 Reduction of impurities in the source gas
• CPC Class Codes: G01N 1/2205 with filters
• CPC Class Codes: G01N 2001/105 from high-pressure reactors or lines

Abstract

An improved process for supplying to a processing apparatus a gas containing at least one impurity that reacts and/or nucleates to form contaminating particles suspended in the gas is disclosed. The improvement includes sampling a flow of the gas upstream of the processing apparatus with a particle counter and/or particle capture filter to detect an amount of the contaminating particles in the flow of the gas, and generating a signal when the amount of particles is in excess of a predetermined amount. An apparatus for performing the process includes: a supply source; at least one processing tool; a particle counter upstream of the processing tool and downstream of the supply source; a microprocessor in electrical communication with at least the particle counter; and optionally a particle capture filter in parallel with the particle counter. The process and apparatus are useful in the manufacture of integrated circuits.

Claims

1. In a manufacturing process comprising supplying to a processing apparatus a gas containing at least one impurity that reacts and/or nucleates to form contaminating particles suspended in the gas, the improvement wherein a particle counter and/or particle capture filter samples a flow of the gas upstream of the processing apparatus to detect an amount of the contaminating particles suspended in the flow of the gas, and a signal is generated when the amount of the contaminating particles is in excess of a predetermined amount.

2. The process of claim 1, wherein the processing apparatus is a chemical vapor deposition epitaxial deposition tool.

3. The process of claim 1, wherein the gas is silane.

4. The process of claim 1, wherein the contaminating particles are products of reactions with at least one of water and oxygen.

5. The process of claim 1, wherein the contaminating particles are nucleated molecular impurities formed by pressure reduction.

6. The process of claim 1, wherein the gas is silane and the contaminating particles comprise at least one member selected from the group consisting of siloxane particles and silica particles.

7. The process of claim 6, wherein a maximum acceptable concentration of silica is determined from the predetermined amount using a calibration curve.

8. The process of claim 7, wherein the predetermined amount of particles correlates with a concentration of 2.75×

10<sup>−

16</sup> mole silica per mole silane in the gas stream.

9. The process of claim 7, wherein the predetermined amount of particles correlates with a silica concentration of 10 parts per trillion.

10. The process of claim 1, wherein the particle counter is an optical particle counter.

11. The process of claim 1, wherein the flow of the gas into the processing apparatus is interrupted when the signal is generated.

12. The process of claim 1, wherein the signal comprises an audible alarm.

13. The process of claim 1, comprising determining at least one member selected from the group consisting of:

(a) a number of particles;

(b) a concentration density of particles;

(c) a particle size distribution;

(d) a particle morphology; and

(e) a particle composition.

14. The process of claim 1, wherein the particle counter and the particle capture filter sample the flow of the gas upstream of the processing apparatus to detect the amount of the contaminating particles.

15. The process of claim 1, wherein an average size of the contaminating particles is from 0.003 μ

m to 10 μ

m.

16. The process of claim 1, wherein an average amount of the contaminating particles measured is from 1/standard cubic foot (cu. ft.) to 10,000,000/cu. ft.

17. In an integrated circuit manufacturing process comprising supplying gaseous silane to a processing apparatus, the improvement wherein at least one of a particle counter and a particle capture filter samples a flow of the silane upstream of the processing apparatus to detect an amount of contaminating particles suspended in the flow of the silane, and a signal is generated when the amount of contaminating particles is in excess of a predetermined amount.

18. An apparatus for maintaining a purity level of a gas feed stream of a processing apparatus at or above a minimum acceptable purity level, said apparatus comprising:

a supply source for supplying the gas;

at least one processing tool in fluid communication with the supply source and adapted to use the gas to perform a processing function;

a particle counter placed upstream of the processing tool and downstream of the supply source;

a microprocessor in electrical communication with at least the particle counter; and

optionally

a particle capture filter arranged in parallel with the particle counter upstream of the processing tool and downstream of the supply source.

19. The apparatus of claim 18, wherein the at least one processing tool is a chemical vapor deposition device and the gas is silane.

20. The apparatus of claim 18, further comprising at least one valve controlled by the microprocessor such that the gas feed stream to the at least one processing tool can be terminated when the microprocessor determines that an amount of contaminating particles in the gas feed steam exceeds a predetermined value.

21. The apparatus of claim 18, wherein the particle counter is an optical particle counter.

22. The apparatus of claim 18, comprising both the particle counter and the particle capture filter.