Methods and systems for removing protective films from microfeature workpieces

• US 20070261783A1
• Filed: 05/10/2006
• Published: 11/15/2007
• Est. Priority Date: 05/10/2006
• Status: Active Grant

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Larson, Charles, Parker, Randall
• Granted Patent: US 7,846,288 B2
• Time in Patent Office: Days
• US Class Current: 156/247
• CPC Class Codes: B29C 63/0013 Removing old coatings
• CPC Class Codes: H01L 21/67132 Apparatus for placing on an insulating substrate, e.g. tape
• CPC Class Codes: Y10S 438/976 Temporary protective layer
• CPC Class Codes: Y10T 156/1132 Using vacuum directly against work during delaminating
• CPC Class Codes: Y10T 156/1137 Using air blast directly against work during delaminating
• CPC Class Codes: Y10T 156/1922 Vibrating delaminating means
• CPC Class Codes: Y10T 156/1939 Air blasting delaminating means]
• CPC Class Codes: Y10T 156/1944 Vacuum delaminating means [e.g., vacuum chamber, etc.]
• CPC Class Codes: Y10T 156/1983 Poking delaminating means

Abstract

Methods and systems for removing protective films from microfeature workpieces are disclosed herein. One particular embodiment of such a method comprises separating at least a portion of a protective tape from a workpiece to which the protective tape is attached with a separator configured to drive against an interface between the protective tape and the workpiece. The method further includes engaging the portion of the protective tape detached from the workpiece with a removal system.

Claims

1. A method for processing a microfeature workpiece having a first side and a second side opposite the first side, the first side being covered by a protective film and the second side being releasably attached to a support member, the method comprising:

detaching at least a portion of the protective film from the workpiece by impinging a stream of gas on an interface between the protective film and the first side of the workpiece.

2. The method of claim 1, further comprising:

engaging at least a portion of the protective film detached by the stream of gas with a removal system including a peel bar carrying a removal tape configured to adhere to the detached portion of the protective film; and

completely removing the protective film from the workpiece using the peel bar and/or the removal tape.

3. The method of claim 1, further comprising:

engaging at least a portion of the protective film detached by the stream of gas with a removal system including a vacuum-type removal system configured to engage and releasably hold the detached portion of the protective film; and

completely removing the protective film from the workpiece using the removal system.

4. The method of claim 1 wherein the stream of gas is a first stream of gas from a first air knife, and wherein the method further comprises:

after detaching at least a portion of the protective film from the workpiece with the first stream of gas, completely removing the protective film from the workpiece with a second stream of gas from a second air knife.

5. The method of claim 1 wherein detaching at least a portion of the protective film by impinging a stream of gas on the protective film comprises completely removing the protective film from the workpiece with the stream of gas.

6. The method of claim 1 wherein detaching at least a portion of the protective film from the workpiece with a stream of gas comprises impinging the protective film with an inert, generally particle-free gas.

7. The method of claim 1 wherein detaching at least a portion of the protective film from the workpiece with a stream of gas comprises impinging the protective film with a stream of gas having a pressure of about 80-120 psi.

8. The method of claim 1 wherein detaching at least a portion of the protective film from the workpiece by impinging a stream of gas comprises impinging the protective film with a stream of gas from an air knife.

9. The method of claim 1, further comprising:

releasably engaging a face portion of the protective film proximate to an edge portion of the workpiece with a vacuum-type removal system before impinging a stream of gas on the protective film; and

drawing the protective film away from the workpiece with the removal system before or approximately simultaneously with impinging the protective film with the stream of gas.

10. The method of claim 1 wherein the workpiece includes a second side opposite the first side, the second side being releasably attached to a support member, and wherein:

detaching at least a portion of the protective film from the workpiece further comprises preventing the stream of gas from affecting the interface between the workpiece and the support member.

11. The method of claim 10 wherein preventing the stream of gas from affecting the interface between the workpiece and the support member comprises shielding or blocking the gas from contacting the support member and/or the interface between the workpiece and the support member.

12. A method for processing a microfeature workpiece, the method comprising:

separating at least a portion of a protective tape from a workpiece to which the protective tape is attached with a separator configured to drive against an interface between the protective tape and the workpiece; and

engaging the portion of the protective tape detached from the workpiece with a removal system.

13. The method of claim 12 wherein separating at least a portion of a protective tape from a workpiece with a separator comprises impinging a stream of gas on the interface between the protective tape and the workpiece.

14. The method of claim 12 wherein separating at least a portion of a protective tape from a workpiece with a separator comprises impinging a stream of gas from an air knife on the interface between the protective tape and the workpiece.

15. The method of claim 12 wherein separating at least a portion of a protective tape from a workpiece with a separator comprises engaging an edge of the protective tape at a periphery portion of the workpiece with a removal roller assembly including plurality of flexible bristles configured to engage and lift the protective tape away from the workpiece.

16. The method of claim 12 wherein:

engaging the portion of the protective tape detached from the workpiece with a removal system comprises engaging the detached portion of the protective tape with a peel bar carrying a removal tape configured to adhere to the detached portion of the protective tape; and

wherein the method further comprises completely removing the protective tape from the workpiece using the peel bar and/or the removal tape.

17. The method of claim 12 wherein:

engaging the portion of the protective tape detached from the workpiece with a removal system comprises engaging the detached portion of the protective tape with a vacuum-type removal system configured to engage and releasably hold the detached portion of the protective tape; and

wherein the method further comprises completely removing the protective tape from the workpiece using the removal system.

18. The method of claim 12, further comprising:

releasably engaging a face portion of the protective tape proximate to an edge portion of the workpiece with a vacuum-type removal system before separating at least a portion of a protective tape from the workpiece with the separator; and

drawing the protective tape away from the workpiece with the removal system before or approximately simultaneously with driving the separator against the interface between the protective tape and the workpiece.

19. The method of claim 12 wherein the workpiece includes a first side and a second side opposite the first side, the first side being covered at least in part by the protective tape and the second side being releasably attached to a support member, and wherein:

separating at least a portion of a protective tape from a workpiece with a separator comprises further comprises blocking the separator from affecting the interface between the workpiece and the support member.

20. A method for processing a microfeature workpiece, the method comprising:

releasably attaching a protective tape to a first side of a microfeature workpiece; and

detaching at least a portion of the protective tape from the workpiece by impinging an interface between the protective tape and the first side of the workpiece with a stream of gas.

21. The method of claim 20 wherein detaching at least a portion of the protective tape from the workpiece comprises impinging the interface between the protective tape and the workpiece with a stream of gas from an air knife.

22. The method of claim 20, further comprising completely removing the protective tape from the first side of the workpiece.

23. The method of claim 22 wherein completely removing the protective tape from the first side of the workpiece comprises:

engaging the portion of the protective tape detached by the stream of gas with a removal system including a peel bar carrying a removal tape configured to adhere to the detached portion of the protective tape; and

removing the protective tape from the workpiece using the peel bar and/or removal tape.

24. The method of claim 22 wherein completely removing the protective tape from the first side of the workpiece comprises:

engaging at least a portion of the protective film detached by the stream of gas with a removal system including a vacuum-type removal system configured to engage and releasably hold the detached portion of the protective film; and

removing the protective tape from the workpiece using the removal system.

25. The method of claim 22 wherein the stream of gas is a first stream of gas from a first air knife, and wherein completely removing the protective tape from the first side of the workpiece comprises:

after detaching at least a portion of the protective tape from the workpiece with the first stream of gas, completely removing the protective tape from the workpiece with a second stream of gas from a second air knife.

26. The method of claim 20, further comprising:

releasably engaging a face portion of the protective tape proximate to the edge portion with a vacuum-type removal system before detaching at least a portion of the protective tape from the workpiece; and

drawing the protective tape away from the first side of the workpiece with the removal system before or at least approximately simultaneously with impinging the interface between the protective tape and the first side of the workpiece with the stream of gas.

27. The method of claim 20, further comprising:

releasably attaching a second side of the workpiece to a support member before detaching at least a portion of the protective tape from the workpiece; and

preventing the stream of gas directed to the interface between the protective tape and the first side of the workpiece from impinging on the support member.

28. A method for processing a microfeature workpiece, the method comprising:

releasably attaching a protective film to a first side of a microfeature workpiece;

releasably attaching a second side of the workpiece to a support member;

initiating detachment of the protective film from the workpiece by impinging a stream of gas from an air knife on an interface between the protective film and the first side of the workpiece;

engaging the detached portion of the protective film with a removal system; and

removing the remaining portions of protective film from the workpiece using the air knife and/or the removal system.

29. The method of claim 28 wherein releasably attaching a second side of the workpiece to a support member includes attaching the workpiece to a dicing frame or a vacuum-type support member.

30. The method of claim 28 wherein:

engaging the detached portion of the protective film with a removal system comprises engaging the protective film with a peel bar carrying a removal tape configured to engage at least a portion of the detached protective film; and

removing the remaining portions of protective film from the workpiece includes using the peel bar and the removal tape to remove the protective film from the workpiece.

31. The method of claim 28 wherein:

engaging the detached portion of the protective film with a removal system comprises engaging the protective film with a vacuum-type removal system configured to engage and releasably hold at least a portion of the detached protective film; and

removing the remaining portions of protective film from the workpiece includes using the removal system to remove the protective film from the workpiece.

32. The method of claim 28, further comprising:

engaging a face portion of the protective film proximate to an edge portion of the workpiece with a vacuum-type removal system after releasably attaching the workpiece to the support member and before initiating detachment of the protective film from the workpiece; and

drawing the face portion of the protective film away from the workpiece with the removal system before or approximately simultaneously with impinging the stream of gas on the interface between the protective film and the first side of the workpiece.

33. The method of claim 28, further comprising blocking the stream of gas from the air knife from an interface between the second side of the workpiece and the support member.

34. The method of claim 28 wherein releasably attaching a protective film to a first side of a microfeature workpiece comprises attaching a protective film to a workpiece having a thickness of less than about 100-200 μ

m.

35. A method for processing a microfeature workpiece, the method comprising:

providing a microfeature workpiece having a first side, a second side opposite the first side, and a protective film releasably attached to the first side; and

detaching at least a portion of the protective film from the workpiece by engaging an edge of the protective film at a periphery portion of the workpiece with a removal roller assembly including plurality of flexible bristles configured to engage and lift the protective film away from the workpiece.

36. The method of claim 35, further comprising:

releasably attaching the second side of the workpiece to a support member; and

moving the support member and workpiece relative to the roller assembly to initiate detachment of the protective film.

37. The method of claim 35, further comprising:

engaging a portion of the protective film initially detached by the roller assembly with a removal system; and

removing the remaining portions of the protective film from the workpiece using the removal system.

38. A system for processing a microfeature workpiece having a first side and a second side opposite the first side, the first side being covered by a protective film and the second side being releasably attached to a support member, the system comprising:

a gas delivery device positioned to direct a stream of gas toward an interface between the protective film and the first side of the workpiece to detach at least a portion of the protective film from the workpiece.

39. The system of claim 38 wherein the gas delivery device comprises an air knife including a plurality of nozzles arranged in a desired pattern to expel the gas with a desired profile.

40. The system of claim 38, further comprising a removal system positioned to releasably engage a portion of the protective film initially detached by the gas delivery device and remove the remaining attached portion of the protective film from the first side of the workpiece.

41. The system of claim 40 wherein the removal system includes a peel bar and removal tape carried at least in part by the peel bar.

42. The system of claim 40 wherein the removal system includes a vacuum-type removal system.

43. The system of claim 38 wherein the gas delivery device is a first gas delivery device positioned to direct a first stream of gas, and wherein the system further comprises a second gas delivery device positioned to direct a second stream of gas toward a portion of the protective film initially detached by the first stream of gas to continue removal of the protective film from the workpiece.

44. The system of claim 38, further comprising a vacuum-type removal system positioned to releasably engage a face portion of the protective film proximate to a periphery portion of the workpiece, the removal system being configured to draw the protective film away from the first side of the workpiece before or at least approximately simultaneously with the gas delivery device impinging the stream of gas on the interface between the protective film and the workpiece.

45. The system of claim 38 wherein the gas delivery device is a first air knife positioned to direct a first stream of gas, and wherein the system further comprises a second air knife positioned to direct a second stream of gas toward the portion of the protective film initially detached by the first stream of gas to remove the protective film from the workpiece.

46. The system of claim 45 wherein the gas delivery device comprises a shielding portion positioned to block the stream of gas from impinging on the support member and/or an interface between the second side of the workpiece and the support member.

47. A system for processing a microfeature workpiece, the system comprising:

a separator configured to drive against an adhesive surface of a protective tape at an interface between the protective tape and a workpiece to which the protective tape is attached; and

a removal system configured to control the movement of a portion of the protective tape detached from the workpiece.

48. The system of claim 47 wherein the separator comprises a gas delivery device positioned to direct a stream of gas toward the interface between the protective tape and the workpiece.

49. The system of claim 47 wherein the separator comprises an air knife positioned to direct a stream of gas toward the interface between the protective tape and the workpiece.

50. The system of claim 47 wherein the separator comprises a removal roller assembly including a plurality of flexible bristles configured to engage an edge portion of the protective tape at a periphery portion of the workpiece and move the protective tape away from the workpiece.

51. The system of claim 47 wherein the removal system includes a peel bar and a removal tape assembly, and wherein the removal tape is carried at least in part by the peel bar.

52. The system of claim 47 wherein the removal system includes a vacuum-type removal system.

53. A system for processing a microfeature workpiece, the system comprising:

separator means for driving against an adhesive surface of a protective tape at an interface between the protective tape and a workpiece to which the protective tape is attached; and

removal means for controlling movement of a portion of the protective tape detached from the workpiece.

54. The system of claim 53 wherein the separator means comprises an air knife positioned to direct a stream of gas toward the interface between the protective tape and the workpiece.

55. The system of claim 53 wherein the separator means comprises a removal roller assembly including a plurality of flexible bristles configured to engage an edge portion of the protective tape at a periphery portion of the workpiece and move the protective tape away from the workpiece.